5/23/2010	12:00:07 AM	Helium valve closed
5/23/2010	12:00:07 AM	H2 valve closed
5/23/2010	12:00:07 AM	BCl3 valve closed
5/23/2010	12:00:07 AM	PH3 valve closed
5/23/2010	12:00:07 AM	SiCl4 pre valve closed
5/23/2010	12:00:07 AM	SiCl4 post valve closed
5/23/2010	12:00:07 AM	Main Vac valve closed
5/23/2010	12:00:07 AM	Bypass valve closed
5/23/2010	12:00:07 AM	Bubbler valve closed
5/23/2010	12:00:07 AM	Helium MFC set to  0.000000
5/23/2010	12:00:07 AM	H2 MFC set to  0.000000
5/23/2010	12:00:07 AM	BCl3 MFC set to  0.000000
5/23/2010	12:00:07 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:00:07 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:00:08 AM	Tube furnace set to 0
5/23/2010	12:00:08 AM	Run finished at 12:00 AM
5/23/2010	12:11:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:11:13 AM	Recipe started at 12:11 AM
5/23/2010	12:11:13 AM	Helium valve closed
5/23/2010	12:11:13 AM	H2 valve closed
5/23/2010	12:11:13 AM	BCl3 valve closed
5/23/2010	12:11:13 AM	PH3 valve closed
5/23/2010	12:11:13 AM	SiCl4 pre valve closed
5/23/2010	12:11:13 AM	SiCl4 post valve closed
5/23/2010	12:11:13 AM	Main Vac valve closed
5/23/2010	12:11:13 AM	Bubbler valve closed
5/23/2010	12:11:13 AM	Bypass valve opened
5/23/2010	12:11:13 AM	Helium MFC set to  0.000000
5/23/2010	12:11:13 AM	H2 MFC set to  0.000000
5/23/2010	12:11:13 AM	BCl3 MFC set to  0.000000
5/23/2010	12:11:13 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:11:13 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:11:13 AM	Tube furnace set to 0
5/23/2010	12:12:00 AM	Helium valve closed
5/23/2010	12:12:00 AM	H2 valve closed
5/23/2010	12:12:00 AM	BCl3 valve closed
5/23/2010	12:12:00 AM	PH3 valve closed
5/23/2010	12:12:00 AM	SiCl4 pre valve closed
5/23/2010	12:12:00 AM	SiCl4 post valve closed
5/23/2010	12:12:00 AM	Bubbler valve closed
5/23/2010	12:12:00 AM	Main Vac valve opened
5/23/2010	12:12:00 AM	Bypass valve opened
5/23/2010	12:12:00 AM	Helium MFC set to  0.000000
5/23/2010	12:12:00 AM	H2 MFC set to  0.000000
5/23/2010	12:12:00 AM	BCl3 MFC set to  0.000000
5/23/2010	12:12:00 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:12:00 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:12:00 AM	Tube furnace set to 0
5/23/2010	12:12:00 AM	Run finished at 12:12 AM
5/23/2010	12:12:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:13:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:13:07 AM	Recipe started at 12:13 AM
5/23/2010	12:13:07 AM	H2 valve closed
5/23/2010	12:13:07 AM	BCl3 valve closed
5/23/2010	12:13:07 AM	PH3 valve closed
5/23/2010	12:13:07 AM	SiCl4 pre valve closed
5/23/2010	12:13:07 AM	SiCl4 post valve closed
5/23/2010	12:13:07 AM	Main Vac valve closed
5/23/2010	12:13:07 AM	Bypass valve closed
5/23/2010	12:13:07 AM	Bubbler valve closed
5/23/2010	12:13:07 AM	Helium valve opened
5/23/2010	12:13:07 AM	Helium MFC set to  500.000000
5/23/2010	12:13:07 AM	H2 MFC set to  0.000000
5/23/2010	12:13:07 AM	BCl3 MFC set to  0.000000
5/23/2010	12:13:07 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:13:07 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:13:07 AM	Tube furnace set to 0
5/23/2010	12:14:25 AM	Helium valve closed
5/23/2010	12:14:25 AM	H2 valve closed
5/23/2010	12:14:25 AM	BCl3 valve closed
5/23/2010	12:14:25 AM	PH3 valve closed
5/23/2010	12:14:25 AM	SiCl4 pre valve closed
5/23/2010	12:14:25 AM	SiCl4 post valve closed
5/23/2010	12:14:25 AM	Main Vac valve closed
5/23/2010	12:14:25 AM	Bypass valve closed
5/23/2010	12:14:25 AM	Bubbler valve closed
5/23/2010	12:14:25 AM	Helium MFC set to  0.000000
5/23/2010	12:14:25 AM	H2 MFC set to  0.000000
5/23/2010	12:14:25 AM	BCl3 MFC set to  0.000000
5/23/2010	12:14:25 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:14:25 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:14:25 AM	Tube furnace set to 0
5/23/2010	12:14:25 AM	Run finished at 12:14 AM
5/23/2010	12:14:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:14:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:14:31 AM	Recipe started at 12:14 AM
5/23/2010	12:14:31 AM	Helium valve closed
5/23/2010	12:14:31 AM	H2 valve closed
5/23/2010	12:14:31 AM	BCl3 valve closed
5/23/2010	12:14:31 AM	PH3 valve closed
5/23/2010	12:14:31 AM	SiCl4 pre valve closed
5/23/2010	12:14:31 AM	SiCl4 post valve closed
5/23/2010	12:14:31 AM	Main Vac valve closed
5/23/2010	12:14:31 AM	Bubbler valve closed
5/23/2010	12:14:31 AM	Bypass valve opened
5/23/2010	12:14:31 AM	Helium MFC set to  0.000000
5/23/2010	12:14:31 AM	H2 MFC set to  0.000000
5/23/2010	12:14:31 AM	BCl3 MFC set to  0.000000
5/23/2010	12:14:31 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:14:31 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:14:31 AM	Tube furnace set to 0
5/23/2010	12:15:03 AM	Helium valve closed
5/23/2010	12:15:03 AM	H2 valve closed
5/23/2010	12:15:03 AM	BCl3 valve closed
5/23/2010	12:15:03 AM	PH3 valve closed
5/23/2010	12:15:03 AM	SiCl4 pre valve closed
5/23/2010	12:15:03 AM	SiCl4 post valve closed
5/23/2010	12:15:03 AM	Bubbler valve closed
5/23/2010	12:15:03 AM	Main Vac valve opened
5/23/2010	12:15:03 AM	Bypass valve opened
5/23/2010	12:15:03 AM	Helium MFC set to  0.000000
5/23/2010	12:15:03 AM	H2 MFC set to  0.000000
5/23/2010	12:15:03 AM	BCl3 MFC set to  0.000000
5/23/2010	12:15:03 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:15:03 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:15:03 AM	Tube furnace set to 0
5/23/2010	12:15:03 AM	Run finished at 12:15 AM
5/23/2010	12:15:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:16:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:16:37 AM	Recipe started at 12:16 AM
5/23/2010	12:16:37 AM	H2 valve closed
5/23/2010	12:16:37 AM	BCl3 valve closed
5/23/2010	12:16:37 AM	PH3 valve closed
5/23/2010	12:16:37 AM	SiCl4 pre valve closed
5/23/2010	12:16:37 AM	SiCl4 post valve closed
5/23/2010	12:16:37 AM	Main Vac valve closed
5/23/2010	12:16:37 AM	Bypass valve closed
5/23/2010	12:16:37 AM	Bubbler valve closed
5/23/2010	12:16:37 AM	Helium valve opened
5/23/2010	12:16:37 AM	Helium MFC set to  500.000000
5/23/2010	12:16:37 AM	H2 MFC set to  0.000000
5/23/2010	12:16:37 AM	BCl3 MFC set to  0.000000
5/23/2010	12:16:37 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:16:37 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:16:37 AM	Tube furnace set to 0
5/23/2010	12:17:54 AM	Helium valve closed
5/23/2010	12:17:54 AM	H2 valve closed
5/23/2010	12:17:54 AM	BCl3 valve closed
5/23/2010	12:17:54 AM	PH3 valve closed
5/23/2010	12:17:54 AM	SiCl4 pre valve closed
5/23/2010	12:17:54 AM	SiCl4 post valve closed
5/23/2010	12:17:54 AM	Main Vac valve closed
5/23/2010	12:17:54 AM	Bypass valve closed
5/23/2010	12:17:54 AM	Bubbler valve closed
5/23/2010	12:17:54 AM	Helium MFC set to  0.000000
5/23/2010	12:17:54 AM	H2 MFC set to  0.000000
5/23/2010	12:17:54 AM	BCl3 MFC set to  0.000000
5/23/2010	12:17:54 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:17:54 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:17:54 AM	Tube furnace set to 0
5/23/2010	12:17:55 AM	Run finished at 12:17 AM
5/23/2010	12:17:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:18:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:18:00 AM	Recipe started at 12:18 AM
5/23/2010	12:18:00 AM	Helium valve closed
5/23/2010	12:18:00 AM	H2 valve closed
5/23/2010	12:18:00 AM	BCl3 valve closed
5/23/2010	12:18:00 AM	PH3 valve closed
5/23/2010	12:18:00 AM	SiCl4 pre valve closed
5/23/2010	12:18:00 AM	SiCl4 post valve closed
5/23/2010	12:18:00 AM	Main Vac valve closed
5/23/2010	12:18:00 AM	Bubbler valve closed
5/23/2010	12:18:00 AM	Bypass valve opened
5/23/2010	12:18:00 AM	Helium MFC set to  0.000000
5/23/2010	12:18:00 AM	H2 MFC set to  0.000000
5/23/2010	12:18:00 AM	BCl3 MFC set to  0.000000
5/23/2010	12:18:00 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:18:00 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:18:01 AM	Tube furnace set to 0
5/23/2010	12:18:32 AM	Helium valve closed
5/23/2010	12:18:32 AM	H2 valve closed
5/23/2010	12:18:32 AM	BCl3 valve closed
5/23/2010	12:18:32 AM	PH3 valve closed
5/23/2010	12:18:32 AM	SiCl4 pre valve closed
5/23/2010	12:18:32 AM	SiCl4 post valve closed
5/23/2010	12:18:32 AM	Bubbler valve closed
5/23/2010	12:18:32 AM	Main Vac valve opened
5/23/2010	12:18:32 AM	Bypass valve opened
5/23/2010	12:18:32 AM	Helium MFC set to  0.000000
5/23/2010	12:18:32 AM	H2 MFC set to  0.000000
5/23/2010	12:18:32 AM	BCl3 MFC set to  0.000000
5/23/2010	12:18:32 AM	SiCl4 MFC set to  0.000000
5/23/2010	12:18:32 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:18:32 AM	Tube furnace set to 0
5/23/2010	12:18:32 AM	Run finished at 12:18 AM
5/23/2010	12:18:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:19:54 AM	Helium MFC set to  100.000000
5/23/2010	12:19:54 AM	Helium valve opened
5/23/2010	12:24:03 AM	Helium valve closed
5/23/2010	12:24:48 AM	Helium MFC set to  0.000000
5/23/2010	1:19:02 AM	Recipe started at 1:19 AM
5/23/2010	1:19:02 AM	Helium valve closed
5/23/2010	1:19:02 AM	BCl3 valve closed
5/23/2010	1:19:02 AM	PH3 valve closed
5/23/2010	1:19:02 AM	SiCl4 pre valve closed
5/23/2010	1:19:02 AM	SiCl4 post valve closed
5/23/2010	1:19:02 AM	Main Vac valve closed
5/23/2010	1:19:02 AM	Bypass valve closed
5/23/2010	1:19:02 AM	Bubbler valve closed
5/23/2010	1:19:02 AM	H2 valve opened
5/23/2010	1:19:02 AM	Helium MFC set to  0.000000
5/23/2010	1:19:02 AM	H2 MFC set to  500.000000
5/23/2010	1:19:02 AM	BCl3 MFC set to  0.000000
5/23/2010	1:19:02 AM	SiCl4 MFC set to  0.000000
5/23/2010	1:19:02 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:19:02 AM	Tube furnace set to 0
5/23/2010	1:20:22 AM	Helium valve closed
5/23/2010	1:20:22 AM	BCl3 valve closed
5/23/2010	1:20:22 AM	PH3 valve closed
5/23/2010	1:20:22 AM	SiCl4 pre valve closed
5/23/2010	1:20:22 AM	SiCl4 post valve closed
5/23/2010	1:20:22 AM	Main Vac valve closed
5/23/2010	1:20:22 AM	Bypass valve closed
5/23/2010	1:20:22 AM	H2 valve opened
5/23/2010	1:20:22 AM	Bubbler valve opened
5/23/2010	1:20:22 AM	Helium MFC set to  0.000000
5/23/2010	1:20:22 AM	H2 MFC set to  500.000000
5/23/2010	1:20:22 AM	BCl3 MFC set to  0.000000
5/23/2010	1:20:22 AM	SiCl4 MFC set to  0.000000
5/23/2010	1:20:22 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:20:22 AM	Tube furnace set to 1000
5/23/2010	1:40:22 AM	Helium valve closed
5/23/2010	1:40:22 AM	PH3 valve closed
5/23/2010	1:40:22 AM	Main Vac valve closed
5/23/2010	1:40:22 AM	Bypass valve closed
5/23/2010	1:40:22 AM	H2 valve opened
5/23/2010	1:40:22 AM	BCl3 valve opened
5/23/2010	1:40:22 AM	SiCl4 pre valve opened
5/23/2010	1:40:22 AM	SiCl4 post valve opened
5/23/2010	1:40:22 AM	Bubbler valve opened
5/23/2010	1:40:22 AM	Helium MFC set to  0.000000
5/23/2010	1:40:22 AM	H2 MFC set to  500.000000
5/23/2010	1:40:22 AM	BCl3 MFC set to  0.000000
5/23/2010	1:40:22 AM	SiCl4 MFC set to  325.000000
5/23/2010	1:40:22 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:40:23 AM	Tube furnace set to 1000
5/23/2010	2:00:23 AM	H2 valve closed
5/23/2010	2:00:23 AM	BCl3 valve closed
5/23/2010	2:00:23 AM	PH3 valve closed
5/23/2010	2:00:23 AM	SiCl4 pre valve closed
5/23/2010	2:00:23 AM	SiCl4 post valve closed
5/23/2010	2:00:23 AM	Main Vac valve closed
5/23/2010	2:00:23 AM	Bypass valve closed
5/23/2010	2:00:23 AM	Helium valve opened
5/23/2010	2:00:23 AM	Bubbler valve opened
5/23/2010	2:00:23 AM	Helium MFC set to  500.000000
5/23/2010	2:00:23 AM	H2 MFC set to  0.000000
5/23/2010	2:00:23 AM	BCl3 MFC set to  0.000000
5/23/2010	2:00:23 AM	SiCl4 MFC set to  0.000000
5/23/2010	2:00:23 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:00:23 AM	Tube furnace set to 0
5/23/2010	2:20:23 AM	Helium valve closed
5/23/2010	2:20:23 AM	H2 valve closed
5/23/2010	2:20:23 AM	BCl3 valve closed
5/23/2010	2:20:23 AM	PH3 valve closed
5/23/2010	2:20:23 AM	SiCl4 pre valve closed
5/23/2010	2:20:23 AM	SiCl4 post valve closed
5/23/2010	2:20:23 AM	Main Vac valve closed
5/23/2010	2:20:23 AM	Bypass valve closed
5/23/2010	2:20:23 AM	Bubbler valve closed
5/23/2010	2:20:23 AM	Helium MFC set to  0.000000
5/23/2010	2:20:23 AM	H2 MFC set to  0.000000
5/23/2010	2:20:23 AM	BCl3 MFC set to  0.000000
5/23/2010	2:20:23 AM	SiCl4 MFC set to  0.000000
5/23/2010	2:20:23 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:20:23 AM	Tube furnace set to 0
5/23/2010	2:20:23 AM	Run finished at 2:20 AM
5/23/2010	2:27:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	2:28:00 AM	Recipe started at 2:27 AM
5/23/2010	2:28:00 AM	Helium valve closed
5/23/2010	2:28:00 AM	H2 valve closed
5/23/2010	2:28:00 AM	BCl3 valve closed
5/23/2010	2:28:00 AM	PH3 valve closed
5/23/2010	2:28:00 AM	SiCl4 pre valve closed
5/23/2010	2:28:00 AM	SiCl4 post valve closed
5/23/2010	2:28:00 AM	Main Vac valve closed
5/23/2010	2:28:00 AM	Bubbler valve closed
5/23/2010	2:28:00 AM	Bypass valve opened
5/23/2010	2:28:00 AM	Helium MFC set to  0.000000
5/23/2010	2:28:00 AM	H2 MFC set to  0.000000
5/23/2010	2:28:00 AM	BCl3 MFC set to  0.000000
5/23/2010	2:28:00 AM	SiCl4 MFC set to  0.000000
5/23/2010	2:28:00 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:28:00 AM	Tube furnace set to 0
5/23/2010	2:28:45 AM	Helium valve closed
5/23/2010	2:28:45 AM	H2 valve closed
5/23/2010	2:28:45 AM	BCl3 valve closed
5/23/2010	2:28:45 AM	PH3 valve closed
5/23/2010	2:28:45 AM	SiCl4 pre valve closed
5/23/2010	2:28:45 AM	SiCl4 post valve closed
5/23/2010	2:28:45 AM	Bubbler valve closed
5/23/2010	2:28:45 AM	Main Vac valve opened
5/23/2010	2:28:45 AM	Bypass valve opened
5/23/2010	2:28:45 AM	Helium MFC set to  0.000000
5/23/2010	2:28:45 AM	H2 MFC set to  0.000000
5/23/2010	2:28:45 AM	BCl3 MFC set to  0.000000
5/23/2010	2:28:45 AM	SiCl4 MFC set to  0.000000
5/23/2010	2:28:45 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:28:45 AM	Tube furnace set to 0
5/23/2010	2:28:45 AM	Run finished at 2:28 AM
5/23/2010	2:28:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:04:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	10:04:07 AM	Recipe started at 10:04 AM
5/23/2010	10:04:07 AM	H2 valve closed
5/23/2010	10:04:07 AM	BCl3 valve closed
5/23/2010	10:04:07 AM	PH3 valve closed
5/23/2010	10:04:07 AM	SiCl4 pre valve closed
5/23/2010	10:04:07 AM	SiCl4 post valve closed
5/23/2010	10:04:07 AM	Main Vac valve closed
5/23/2010	10:04:07 AM	Bypass valve closed
5/23/2010	10:04:07 AM	Bubbler valve closed
5/23/2010	10:04:07 AM	Helium valve opened
5/23/2010	10:04:07 AM	Helium MFC set to  500.000000
5/23/2010	10:04:07 AM	H2 MFC set to  0.000000
5/23/2010	10:04:07 AM	BCl3 MFC set to  0.000000
5/23/2010	10:04:07 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:04:07 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:04:07 AM	Tube furnace set to 0
5/23/2010	10:05:29 AM	Helium valve closed
5/23/2010	10:05:29 AM	H2 valve closed
5/23/2010	10:05:29 AM	BCl3 valve closed
5/23/2010	10:05:29 AM	PH3 valve closed
5/23/2010	10:05:29 AM	SiCl4 pre valve closed
5/23/2010	10:05:29 AM	SiCl4 post valve closed
5/23/2010	10:05:29 AM	Main Vac valve closed
5/23/2010	10:05:29 AM	Bypass valve closed
5/23/2010	10:05:29 AM	Bubbler valve closed
5/23/2010	10:05:29 AM	Helium MFC set to  0.000000
5/23/2010	10:05:29 AM	H2 MFC set to  0.000000
5/23/2010	10:05:29 AM	BCl3 MFC set to  0.000000
5/23/2010	10:05:29 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:05:29 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:05:29 AM	Tube furnace set to 0
5/23/2010	10:05:29 AM	Run finished at 10:05 AM
5/23/2010	10:05:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	10:08:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:08:01 AM	Recipe started at 10:08 AM
5/23/2010	10:08:01 AM	Helium valve closed
5/23/2010	10:08:01 AM	H2 valve closed
5/23/2010	10:08:01 AM	BCl3 valve closed
5/23/2010	10:08:01 AM	PH3 valve closed
5/23/2010	10:08:01 AM	SiCl4 pre valve closed
5/23/2010	10:08:01 AM	SiCl4 post valve closed
5/23/2010	10:08:01 AM	Main Vac valve closed
5/23/2010	10:08:01 AM	Bubbler valve closed
5/23/2010	10:08:01 AM	Bypass valve opened
5/23/2010	10:08:01 AM	Helium MFC set to  0.000000
5/23/2010	10:08:01 AM	H2 MFC set to  0.000000
5/23/2010	10:08:01 AM	BCl3 MFC set to  0.000000
5/23/2010	10:08:01 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:08:01 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:08:01 AM	Tube furnace set to 0
5/23/2010	10:08:46 AM	Helium valve closed
5/23/2010	10:08:46 AM	H2 valve closed
5/23/2010	10:08:46 AM	BCl3 valve closed
5/23/2010	10:08:46 AM	PH3 valve closed
5/23/2010	10:08:46 AM	SiCl4 pre valve closed
5/23/2010	10:08:46 AM	SiCl4 post valve closed
5/23/2010	10:08:46 AM	Bubbler valve closed
5/23/2010	10:08:46 AM	Main Vac valve opened
5/23/2010	10:08:46 AM	Bypass valve opened
5/23/2010	10:08:46 AM	Helium MFC set to  0.000000
5/23/2010	10:08:46 AM	H2 MFC set to  0.000000
5/23/2010	10:08:46 AM	BCl3 MFC set to  0.000000
5/23/2010	10:08:46 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:08:46 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:08:46 AM	Tube furnace set to 0
5/23/2010	10:08:47 AM	Run finished at 10:08 AM
5/23/2010	10:08:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:10:47 AM	Recipe started at 10:10 AM
5/23/2010	10:10:47 AM	Helium valve closed
5/23/2010	10:10:47 AM	H2 valve closed
5/23/2010	10:10:47 AM	BCl3 valve closed
5/23/2010	10:10:47 AM	PH3 valve closed
5/23/2010	10:10:47 AM	SiCl4 pre valve closed
5/23/2010	10:10:47 AM	SiCl4 post valve closed
5/23/2010	10:10:47 AM	Main Vac valve closed
5/23/2010	10:10:47 AM	Bubbler valve closed
5/23/2010	10:10:47 AM	Bypass valve opened
5/23/2010	10:10:47 AM	Helium MFC set to  0.000000
5/23/2010	10:10:47 AM	H2 MFC set to  0.000000
5/23/2010	10:10:47 AM	BCl3 MFC set to  0.000000
5/23/2010	10:10:47 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:10:47 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:10:47 AM	Tube furnace set to 0
5/23/2010	10:10:48 AM	Helium valve closed
5/23/2010	10:10:48 AM	H2 valve closed
5/23/2010	10:10:48 AM	BCl3 valve closed
5/23/2010	10:10:48 AM	PH3 valve closed
5/23/2010	10:10:48 AM	SiCl4 pre valve closed
5/23/2010	10:10:48 AM	SiCl4 post valve closed
5/23/2010	10:10:48 AM	Bubbler valve closed
5/23/2010	10:10:48 AM	Main Vac valve opened
5/23/2010	10:10:48 AM	Bypass valve opened
5/23/2010	10:10:48 AM	Helium MFC set to  0.000000
5/23/2010	10:10:48 AM	H2 MFC set to  0.000000
5/23/2010	10:10:48 AM	BCl3 MFC set to  0.000000
5/23/2010	10:10:48 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:10:48 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:10:48 AM	Tube furnace set to 0
5/23/2010	10:10:59 AM	H2 valve closed
5/23/2010	10:10:59 AM	BCl3 valve closed
5/23/2010	10:10:59 AM	PH3 valve closed
5/23/2010	10:10:59 AM	SiCl4 pre valve closed
5/23/2010	10:10:59 AM	SiCl4 post valve closed
5/23/2010	10:10:59 AM	Bubbler valve closed
5/23/2010	10:10:59 AM	Helium valve opened
5/23/2010	10:10:59 AM	Main Vac valve opened
5/23/2010	10:10:59 AM	Bypass valve opened
5/23/2010	10:10:59 AM	Helium MFC set to  100.000000
5/23/2010	10:10:59 AM	H2 MFC set to  0.000000
5/23/2010	10:10:59 AM	BCl3 MFC set to  0.000000
5/23/2010	10:10:59 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:10:59 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:10:59 AM	Tube furnace set to 0
5/23/2010	10:12:59 AM	Helium valve closed
5/23/2010	10:12:59 AM	H2 valve closed
5/23/2010	10:12:59 AM	BCl3 valve closed
5/23/2010	10:12:59 AM	PH3 valve closed
5/23/2010	10:12:59 AM	SiCl4 pre valve closed
5/23/2010	10:12:59 AM	SiCl4 post valve closed
5/23/2010	10:12:59 AM	Bubbler valve closed
5/23/2010	10:12:59 AM	Main Vac valve opened
5/23/2010	10:12:59 AM	Bypass valve opened
5/23/2010	10:12:59 AM	Helium MFC set to  0.000000
5/23/2010	10:12:59 AM	H2 MFC set to  0.000000
5/23/2010	10:12:59 AM	BCl3 MFC set to  0.000000
5/23/2010	10:12:59 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:12:59 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:12:59 AM	Tube furnace set to 0
5/23/2010	10:13:47 AM	H2 valve closed
5/23/2010	10:13:47 AM	BCl3 valve closed
5/23/2010	10:13:47 AM	PH3 valve closed
5/23/2010	10:13:47 AM	SiCl4 pre valve closed
5/23/2010	10:13:47 AM	SiCl4 post valve closed
5/23/2010	10:13:47 AM	Bubbler valve closed
5/23/2010	10:13:47 AM	Helium valve opened
5/23/2010	10:13:47 AM	Main Vac valve opened
5/23/2010	10:13:47 AM	Bypass valve opened
5/23/2010	10:13:47 AM	Helium MFC set to  100.000000
5/23/2010	10:13:47 AM	H2 MFC set to  0.000000
5/23/2010	10:13:47 AM	BCl3 MFC set to  0.000000
5/23/2010	10:13:47 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:13:47 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:13:47 AM	Tube furnace set to 0
5/23/2010	10:15:27 AM	Helium valve closed
5/23/2010	10:15:27 AM	H2 valve closed
5/23/2010	10:15:27 AM	BCl3 valve closed
5/23/2010	10:15:27 AM	PH3 valve closed
5/23/2010	10:15:27 AM	SiCl4 pre valve closed
5/23/2010	10:15:27 AM	SiCl4 post valve closed
5/23/2010	10:15:27 AM	Bubbler valve closed
5/23/2010	10:15:27 AM	Main Vac valve opened
5/23/2010	10:15:27 AM	Bypass valve opened
5/23/2010	10:15:27 AM	Helium MFC set to  0.000000
5/23/2010	10:15:27 AM	H2 MFC set to  0.000000
5/23/2010	10:15:27 AM	BCl3 MFC set to  0.000000
5/23/2010	10:15:27 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:15:27 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:15:27 AM	Tube furnace set to 0
5/23/2010	10:16:21 AM	Run finished at 10:16 AM
5/23/2010	10:16:39 AM	Main Vac valve closed
5/23/2010	10:16:40 AM	Bypass valve closed
5/23/2010	10:17:02 AM	Bypass valve opened
5/23/2010	10:17:03 AM	Main Vac valve opened
5/23/2010	10:17:15 AM	Recipe started at 10:17 AM
5/23/2010	10:17:15 AM	Helium valve closed
5/23/2010	10:17:15 AM	H2 valve closed
5/23/2010	10:17:15 AM	BCl3 valve closed
5/23/2010	10:17:15 AM	PH3 valve closed
5/23/2010	10:17:15 AM	SiCl4 pre valve closed
5/23/2010	10:17:15 AM	SiCl4 post valve closed
5/23/2010	10:17:15 AM	Main Vac valve closed
5/23/2010	10:17:15 AM	Bubbler valve closed
5/23/2010	10:17:15 AM	Bypass valve opened
5/23/2010	10:17:15 AM	Helium MFC set to  0.000000
5/23/2010	10:17:15 AM	H2 MFC set to  0.000000
5/23/2010	10:17:15 AM	BCl3 MFC set to  0.000000
5/23/2010	10:17:15 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:17:15 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:17:15 AM	Tube furnace set to 0
5/23/2010	10:17:15 AM	Helium valve closed
5/23/2010	10:17:15 AM	H2 valve closed
5/23/2010	10:17:15 AM	BCl3 valve closed
5/23/2010	10:17:15 AM	PH3 valve closed
5/23/2010	10:17:15 AM	SiCl4 pre valve closed
5/23/2010	10:17:15 AM	SiCl4 post valve closed
5/23/2010	10:17:15 AM	Bubbler valve closed
5/23/2010	10:17:15 AM	Main Vac valve opened
5/23/2010	10:17:15 AM	Bypass valve opened
5/23/2010	10:17:15 AM	Helium MFC set to  0.000000
5/23/2010	10:17:15 AM	H2 MFC set to  0.000000
5/23/2010	10:17:15 AM	BCl3 MFC set to  0.000000
5/23/2010	10:17:15 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:17:15 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:17:15 AM	Tube furnace set to 0
5/23/2010	10:17:19 AM	H2 valve closed
5/23/2010	10:17:19 AM	BCl3 valve closed
5/23/2010	10:17:19 AM	PH3 valve closed
5/23/2010	10:17:19 AM	SiCl4 pre valve closed
5/23/2010	10:17:19 AM	SiCl4 post valve closed
5/23/2010	10:17:19 AM	Bubbler valve closed
5/23/2010	10:17:19 AM	Helium valve opened
5/23/2010	10:17:19 AM	Main Vac valve opened
5/23/2010	10:17:19 AM	Bypass valve opened
5/23/2010	10:17:19 AM	Helium MFC set to  100.000000
5/23/2010	10:17:19 AM	H2 MFC set to  0.000000
5/23/2010	10:17:19 AM	BCl3 MFC set to  0.000000
5/23/2010	10:17:19 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:17:19 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:17:19 AM	Tube furnace set to 0
5/23/2010	10:17:33 AM	Helium valve closed
5/23/2010	10:17:33 AM	H2 valve closed
5/23/2010	10:17:33 AM	BCl3 valve closed
5/23/2010	10:17:33 AM	PH3 valve closed
5/23/2010	10:17:33 AM	SiCl4 pre valve closed
5/23/2010	10:17:33 AM	SiCl4 post valve closed
5/23/2010	10:17:33 AM	Bubbler valve closed
5/23/2010	10:17:33 AM	Main Vac valve opened
5/23/2010	10:17:33 AM	Bypass valve opened
5/23/2010	10:17:33 AM	Helium MFC set to  0.000000
5/23/2010	10:17:33 AM	H2 MFC set to  0.000000
5/23/2010	10:17:33 AM	BCl3 MFC set to  0.000000
5/23/2010	10:17:33 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:17:33 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:17:33 AM	Tube furnace set to 0
5/23/2010	10:17:43 AM	H2 valve closed
5/23/2010	10:17:43 AM	BCl3 valve closed
5/23/2010	10:17:43 AM	PH3 valve closed
5/23/2010	10:17:43 AM	SiCl4 pre valve closed
5/23/2010	10:17:43 AM	SiCl4 post valve closed
5/23/2010	10:17:43 AM	Bubbler valve closed
5/23/2010	10:17:43 AM	Helium valve opened
5/23/2010	10:17:43 AM	Main Vac valve opened
5/23/2010	10:17:43 AM	Bypass valve opened
5/23/2010	10:17:43 AM	Helium MFC set to  100.000000
5/23/2010	10:17:43 AM	H2 MFC set to  0.000000
5/23/2010	10:17:43 AM	BCl3 MFC set to  0.000000
5/23/2010	10:17:43 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:17:43 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:17:43 AM	Tube furnace set to 0
5/23/2010	10:18:26 AM	Helium valve closed
5/23/2010	10:18:26 AM	H2 valve closed
5/23/2010	10:18:26 AM	BCl3 valve closed
5/23/2010	10:18:26 AM	PH3 valve closed
5/23/2010	10:18:26 AM	SiCl4 pre valve closed
5/23/2010	10:18:26 AM	SiCl4 post valve closed
5/23/2010	10:18:26 AM	Bubbler valve closed
5/23/2010	10:18:26 AM	Main Vac valve opened
5/23/2010	10:18:26 AM	Bypass valve opened
5/23/2010	10:18:26 AM	Helium MFC set to  0.000000
5/23/2010	10:18:26 AM	H2 MFC set to  0.000000
5/23/2010	10:18:26 AM	BCl3 MFC set to  0.000000
5/23/2010	10:18:26 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:18:26 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:18:26 AM	Tube furnace set to 0
5/23/2010	10:19:29 AM	Run finished at 10:19 AM
5/23/2010	10:21:41 AM	Recipe started at 10:21 AM
5/23/2010	10:21:41 AM	Helium valve closed
5/23/2010	10:21:41 AM	BCl3 valve closed
5/23/2010	10:21:41 AM	PH3 valve closed
5/23/2010	10:21:41 AM	SiCl4 pre valve closed
5/23/2010	10:21:41 AM	SiCl4 post valve closed
5/23/2010	10:21:41 AM	Main Vac valve closed
5/23/2010	10:21:41 AM	Bypass valve closed
5/23/2010	10:21:41 AM	Bubbler valve closed
5/23/2010	10:21:41 AM	H2 valve opened
5/23/2010	10:21:41 AM	Helium MFC set to  0.000000
5/23/2010	10:21:41 AM	H2 MFC set to  500.000000
5/23/2010	10:21:41 AM	BCl3 MFC set to  0.000000
5/23/2010	10:21:41 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:21:41 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:21:41 AM	Tube furnace set to 0
5/23/2010	10:23:05 AM	Helium valve closed
5/23/2010	10:23:05 AM	BCl3 valve closed
5/23/2010	10:23:05 AM	PH3 valve closed
5/23/2010	10:23:05 AM	SiCl4 pre valve closed
5/23/2010	10:23:05 AM	SiCl4 post valve closed
5/23/2010	10:23:05 AM	Main Vac valve closed
5/23/2010	10:23:05 AM	Bypass valve closed
5/23/2010	10:23:05 AM	H2 valve opened
5/23/2010	10:23:05 AM	Bubbler valve opened
5/23/2010	10:23:05 AM	Helium MFC set to  0.000000
5/23/2010	10:23:05 AM	H2 MFC set to  400.000000
5/23/2010	10:23:05 AM	BCl3 MFC set to  0.000000
5/23/2010	10:23:05 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:23:05 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:23:05 AM	Tube furnace set to 1005
5/23/2010	10:42:35 AM	Helium valve closed
5/23/2010	10:42:35 AM	H2 valve closed
5/23/2010	10:42:35 AM	PH3 valve closed
5/23/2010	10:42:35 AM	Main Vac valve closed
5/23/2010	10:42:35 AM	Bypass valve closed
5/23/2010	10:42:35 AM	BCl3 valve opened
5/23/2010	10:42:35 AM	SiCl4 pre valve opened
5/23/2010	10:42:35 AM	SiCl4 post valve opened
5/23/2010	10:42:35 AM	Bubbler valve opened
5/23/2010	10:42:35 AM	Helium MFC set to  0.000000
5/23/2010	10:42:35 AM	H2 MFC set to  0.000000
5/23/2010	10:42:35 AM	BCl3 MFC set to  35.000000
5/23/2010	10:42:35 AM	SiCl4 MFC set to  500.000000
5/23/2010	10:42:35 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:42:35 AM	Tube furnace set to 1000
5/23/2010	10:42:50 AM	Helium valve closed
5/23/2010	10:42:50 AM	PH3 valve closed
5/23/2010	10:42:50 AM	Main Vac valve closed
5/23/2010	10:42:50 AM	Bypass valve closed
5/23/2010	10:42:50 AM	H2 valve opened
5/23/2010	10:42:50 AM	BCl3 valve opened
5/23/2010	10:42:50 AM	SiCl4 pre valve opened
5/23/2010	10:42:50 AM	SiCl4 post valve opened
5/23/2010	10:42:50 AM	Bubbler valve opened
5/23/2010	10:42:50 AM	Helium MFC set to  0.000000
5/23/2010	10:42:50 AM	H2 MFC set to  450.000000
5/23/2010	10:42:50 AM	BCl3 MFC set to  35.000000
5/23/2010	10:42:50 AM	SiCl4 MFC set to  400.000000
5/23/2010	10:42:50 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:42:50 AM	Tube furnace set to 1000
5/23/2010	10:43:50 AM	H2 valve closed
5/23/2010	10:43:50 AM	BCl3 valve closed
5/23/2010	10:43:50 AM	PH3 valve closed
5/23/2010	10:43:50 AM	SiCl4 pre valve closed
5/23/2010	10:43:50 AM	SiCl4 post valve closed
5/23/2010	10:43:50 AM	Main Vac valve closed
5/23/2010	10:43:50 AM	Bypass valve closed
5/23/2010	10:43:50 AM	Helium valve opened
5/23/2010	10:43:50 AM	Bubbler valve opened
5/23/2010	10:43:50 AM	Helium MFC set to  400.000000
5/23/2010	10:43:50 AM	H2 MFC set to  0.000000
5/23/2010	10:43:50 AM	BCl3 MFC set to  0.000000
5/23/2010	10:43:50 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:43:50 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:43:50 AM	Tube furnace set to 0
5/23/2010	10:50:05 AM	Helium valve closed
5/23/2010	10:50:05 AM	H2 valve closed
5/23/2010	10:50:05 AM	BCl3 valve closed
5/23/2010	10:50:05 AM	PH3 valve closed
5/23/2010	10:50:05 AM	SiCl4 pre valve closed
5/23/2010	10:50:05 AM	SiCl4 post valve closed
5/23/2010	10:50:05 AM	Main Vac valve closed
5/23/2010	10:50:05 AM	Bypass valve closed
5/23/2010	10:50:05 AM	Bubbler valve closed
5/23/2010	10:50:05 AM	Helium MFC set to  0.000000
5/23/2010	10:50:05 AM	H2 MFC set to  0.000000
5/23/2010	10:50:05 AM	BCl3 MFC set to  0.000000
5/23/2010	10:50:05 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:50:05 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:50:05 AM	Tube furnace set to 0
5/23/2010	10:50:06 AM	Run finished at 10:50 AM
5/23/2010	10:51:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:51:12 AM	Recipe started at 10:51 AM
5/23/2010	10:51:12 AM	Helium valve closed
5/23/2010	10:51:12 AM	H2 valve closed
5/23/2010	10:51:12 AM	BCl3 valve closed
5/23/2010	10:51:12 AM	PH3 valve closed
5/23/2010	10:51:12 AM	SiCl4 pre valve closed
5/23/2010	10:51:12 AM	SiCl4 post valve closed
5/23/2010	10:51:12 AM	Main Vac valve closed
5/23/2010	10:51:12 AM	Bubbler valve closed
5/23/2010	10:51:12 AM	Bypass valve opened
5/23/2010	10:51:12 AM	Helium MFC set to  0.000000
5/23/2010	10:51:12 AM	H2 MFC set to  0.000000
5/23/2010	10:51:12 AM	BCl3 MFC set to  0.000000
5/23/2010	10:51:12 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:51:12 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:51:12 AM	Tube furnace set to 0
5/23/2010	10:51:53 AM	Helium valve closed
5/23/2010	10:51:53 AM	H2 valve closed
5/23/2010	10:51:53 AM	BCl3 valve closed
5/23/2010	10:51:53 AM	PH3 valve closed
5/23/2010	10:51:53 AM	SiCl4 pre valve closed
5/23/2010	10:51:53 AM	SiCl4 post valve closed
5/23/2010	10:51:53 AM	Bubbler valve closed
5/23/2010	10:51:53 AM	Main Vac valve opened
5/23/2010	10:51:53 AM	Bypass valve opened
5/23/2010	10:51:53 AM	Helium MFC set to  0.000000
5/23/2010	10:51:53 AM	H2 MFC set to  0.000000
5/23/2010	10:51:53 AM	BCl3 MFC set to  0.000000
5/23/2010	10:51:53 AM	SiCl4 MFC set to  0.000000
5/23/2010	10:51:53 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:51:54 AM	Tube furnace set to 0
5/23/2010	10:51:54 AM	Run finished at 10:51 AM
5/23/2010	10:51:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	11:00:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	11:00:09 AM	Recipe started at 11:00 AM
5/23/2010	11:00:09 AM	H2 valve closed
5/23/2010	11:00:09 AM	BCl3 valve closed
5/23/2010	11:00:09 AM	PH3 valve closed
5/23/2010	11:00:09 AM	SiCl4 pre valve closed
5/23/2010	11:00:09 AM	SiCl4 post valve closed
5/23/2010	11:00:09 AM	Main Vac valve closed
5/23/2010	11:00:09 AM	Bypass valve closed
5/23/2010	11:00:09 AM	Bubbler valve closed
5/23/2010	11:00:09 AM	Helium valve opened
5/23/2010	11:00:09 AM	Helium MFC set to  500.000000
5/23/2010	11:00:09 AM	H2 MFC set to  0.000000
5/23/2010	11:00:09 AM	BCl3 MFC set to  0.000000
5/23/2010	11:00:09 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:00:09 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:00:09 AM	Tube furnace set to 0
5/23/2010	11:01:27 AM	Helium valve closed
5/23/2010	11:01:27 AM	H2 valve closed
5/23/2010	11:01:27 AM	BCl3 valve closed
5/23/2010	11:01:27 AM	PH3 valve closed
5/23/2010	11:01:27 AM	SiCl4 pre valve closed
5/23/2010	11:01:27 AM	SiCl4 post valve closed
5/23/2010	11:01:27 AM	Main Vac valve closed
5/23/2010	11:01:27 AM	Bypass valve closed
5/23/2010	11:01:27 AM	Bubbler valve closed
5/23/2010	11:01:27 AM	Helium MFC set to  0.000000
5/23/2010	11:01:27 AM	H2 MFC set to  0.000000
5/23/2010	11:01:27 AM	BCl3 MFC set to  0.000000
5/23/2010	11:01:27 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:01:27 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:01:27 AM	Tube furnace set to 0
5/23/2010	11:01:27 AM	Run finished at 11:01 AM
5/23/2010	11:01:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	11:03:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	11:03:56 AM	Recipe started at 11:03 AM
5/23/2010	11:03:56 AM	Helium valve closed
5/23/2010	11:03:56 AM	H2 valve closed
5/23/2010	11:03:56 AM	BCl3 valve closed
5/23/2010	11:03:56 AM	PH3 valve closed
5/23/2010	11:03:56 AM	SiCl4 pre valve closed
5/23/2010	11:03:56 AM	SiCl4 post valve closed
5/23/2010	11:03:56 AM	Main Vac valve closed
5/23/2010	11:03:56 AM	Bubbler valve closed
5/23/2010	11:03:56 AM	Bypass valve opened
5/23/2010	11:03:56 AM	Helium MFC set to  0.000000
5/23/2010	11:03:56 AM	H2 MFC set to  0.000000
5/23/2010	11:03:56 AM	BCl3 MFC set to  0.000000
5/23/2010	11:03:56 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:03:56 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:03:57 AM	Tube furnace set to 0
5/23/2010	11:04:41 AM	Helium valve closed
5/23/2010	11:04:41 AM	H2 valve closed
5/23/2010	11:04:41 AM	BCl3 valve closed
5/23/2010	11:04:41 AM	PH3 valve closed
5/23/2010	11:04:41 AM	SiCl4 pre valve closed
5/23/2010	11:04:41 AM	SiCl4 post valve closed
5/23/2010	11:04:41 AM	Bubbler valve closed
5/23/2010	11:04:41 AM	Main Vac valve opened
5/23/2010	11:04:41 AM	Bypass valve opened
5/23/2010	11:04:41 AM	Helium MFC set to  0.000000
5/23/2010	11:04:41 AM	H2 MFC set to  0.000000
5/23/2010	11:04:41 AM	BCl3 MFC set to  0.000000
5/23/2010	11:04:41 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:04:41 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:04:41 AM	Tube furnace set to 0
5/23/2010	11:04:41 AM	Run finished at 11:04 AM
5/23/2010	11:04:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	11:06:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	11:06:39 AM	Recipe started at 11:06 AM
5/23/2010	11:06:39 AM	H2 valve closed
5/23/2010	11:06:39 AM	BCl3 valve closed
5/23/2010	11:06:39 AM	PH3 valve closed
5/23/2010	11:06:39 AM	SiCl4 pre valve closed
5/23/2010	11:06:39 AM	SiCl4 post valve closed
5/23/2010	11:06:39 AM	Main Vac valve closed
5/23/2010	11:06:39 AM	Bypass valve closed
5/23/2010	11:06:39 AM	Bubbler valve closed
5/23/2010	11:06:39 AM	Helium valve opened
5/23/2010	11:06:39 AM	Helium MFC set to  500.000000
5/23/2010	11:06:39 AM	H2 MFC set to  0.000000
5/23/2010	11:06:39 AM	BCl3 MFC set to  0.000000
5/23/2010	11:06:39 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:06:39 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:06:40 AM	Tube furnace set to 0
5/23/2010	11:07:02 AM	Helium valve closed
5/23/2010	11:07:02 AM	H2 valve closed
5/23/2010	11:07:02 AM	BCl3 valve closed
5/23/2010	11:07:02 AM	PH3 valve closed
5/23/2010	11:07:02 AM	SiCl4 pre valve closed
5/23/2010	11:07:02 AM	SiCl4 post valve closed
5/23/2010	11:07:02 AM	Main Vac valve closed
5/23/2010	11:07:02 AM	Bypass valve closed
5/23/2010	11:07:02 AM	Bubbler valve closed
5/23/2010	11:07:02 AM	Helium MFC set to  0.000000
5/23/2010	11:07:02 AM	H2 MFC set to  0.000000
5/23/2010	11:07:02 AM	BCl3 MFC set to  0.000000
5/23/2010	11:07:02 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:07:02 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:07:02 AM	Tube furnace set to 0
5/23/2010	11:07:17 AM	Helium valve closed
5/23/2010	11:07:17 AM	H2 valve closed
5/23/2010	11:07:17 AM	BCl3 valve closed
5/23/2010	11:07:17 AM	PH3 valve closed
5/23/2010	11:07:17 AM	SiCl4 pre valve closed
5/23/2010	11:07:17 AM	SiCl4 post valve closed
5/23/2010	11:07:17 AM	Main Vac valve closed
5/23/2010	11:07:17 AM	Bubbler valve closed
5/23/2010	11:07:17 AM	Bypass valve opened
5/23/2010	11:07:17 AM	Helium MFC set to  0.000000
5/23/2010	11:07:17 AM	H2 MFC set to  0.000000
5/23/2010	11:07:17 AM	BCl3 MFC set to  0.000000
5/23/2010	11:07:17 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:07:17 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:07:18 AM	Tube furnace set to 0
5/23/2010	11:07:39 AM	Helium valve closed
5/23/2010	11:07:39 AM	H2 valve closed
5/23/2010	11:07:39 AM	BCl3 valve closed
5/23/2010	11:07:39 AM	PH3 valve closed
5/23/2010	11:07:39 AM	SiCl4 pre valve closed
5/23/2010	11:07:39 AM	SiCl4 post valve closed
5/23/2010	11:07:39 AM	Bubbler valve closed
5/23/2010	11:07:39 AM	Main Vac valve opened
5/23/2010	11:07:39 AM	Bypass valve opened
5/23/2010	11:07:39 AM	Helium MFC set to  0.000000
5/23/2010	11:07:39 AM	H2 MFC set to  0.000000
5/23/2010	11:07:39 AM	BCl3 MFC set to  0.000000
5/23/2010	11:07:39 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:07:39 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:07:39 AM	Tube furnace set to 0
5/23/2010	11:08:44 AM	H2 valve closed
5/23/2010	11:08:44 AM	BCl3 valve closed
5/23/2010	11:08:44 AM	PH3 valve closed
5/23/2010	11:08:44 AM	SiCl4 pre valve closed
5/23/2010	11:08:44 AM	SiCl4 post valve closed
5/23/2010	11:08:44 AM	Main Vac valve closed
5/23/2010	11:08:44 AM	Bypass valve closed
5/23/2010	11:08:44 AM	Bubbler valve closed
5/23/2010	11:08:44 AM	Helium valve opened
5/23/2010	11:08:44 AM	Helium MFC set to  500.000000
5/23/2010	11:08:44 AM	H2 MFC set to  0.000000
5/23/2010	11:08:44 AM	BCl3 MFC set to  0.000000
5/23/2010	11:08:44 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:08:44 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:08:44 AM	Tube furnace set to 0
5/23/2010	11:10:00 AM	Helium valve closed
5/23/2010	11:10:00 AM	H2 valve closed
5/23/2010	11:10:00 AM	BCl3 valve closed
5/23/2010	11:10:00 AM	PH3 valve closed
5/23/2010	11:10:00 AM	SiCl4 pre valve closed
5/23/2010	11:10:00 AM	SiCl4 post valve closed
5/23/2010	11:10:00 AM	Main Vac valve closed
5/23/2010	11:10:00 AM	Bypass valve closed
5/23/2010	11:10:00 AM	Bubbler valve closed
5/23/2010	11:10:00 AM	Helium MFC set to  0.000000
5/23/2010	11:10:00 AM	H2 MFC set to  0.000000
5/23/2010	11:10:00 AM	BCl3 MFC set to  0.000000
5/23/2010	11:10:00 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:10:00 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:10:00 AM	Tube furnace set to 0
5/23/2010	11:10:15 AM	Helium valve closed
5/23/2010	11:10:15 AM	H2 valve closed
5/23/2010	11:10:15 AM	BCl3 valve closed
5/23/2010	11:10:15 AM	PH3 valve closed
5/23/2010	11:10:15 AM	SiCl4 pre valve closed
5/23/2010	11:10:15 AM	SiCl4 post valve closed
5/23/2010	11:10:15 AM	Main Vac valve closed
5/23/2010	11:10:15 AM	Bubbler valve closed
5/23/2010	11:10:15 AM	Bypass valve opened
5/23/2010	11:10:15 AM	Helium MFC set to  0.000000
5/23/2010	11:10:15 AM	H2 MFC set to  0.000000
5/23/2010	11:10:15 AM	BCl3 MFC set to  0.000000
5/23/2010	11:10:15 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:10:15 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:10:15 AM	Tube furnace set to 0
5/23/2010	11:10:47 AM	Helium valve closed
5/23/2010	11:10:47 AM	H2 valve closed
5/23/2010	11:10:47 AM	BCl3 valve closed
5/23/2010	11:10:47 AM	PH3 valve closed
5/23/2010	11:10:47 AM	SiCl4 pre valve closed
5/23/2010	11:10:47 AM	SiCl4 post valve closed
5/23/2010	11:10:47 AM	Bubbler valve closed
5/23/2010	11:10:47 AM	Main Vac valve opened
5/23/2010	11:10:47 AM	Bypass valve opened
5/23/2010	11:10:47 AM	Helium MFC set to  0.000000
5/23/2010	11:10:47 AM	H2 MFC set to  0.000000
5/23/2010	11:10:47 AM	BCl3 MFC set to  0.000000
5/23/2010	11:10:47 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:10:47 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:10:47 AM	Tube furnace set to 0
5/23/2010	11:11:38 AM	H2 valve closed
5/23/2010	11:11:38 AM	BCl3 valve closed
5/23/2010	11:11:38 AM	PH3 valve closed
5/23/2010	11:11:38 AM	SiCl4 pre valve closed
5/23/2010	11:11:38 AM	SiCl4 post valve closed
5/23/2010	11:11:38 AM	Main Vac valve closed
5/23/2010	11:11:38 AM	Bypass valve closed
5/23/2010	11:11:38 AM	Bubbler valve closed
5/23/2010	11:11:38 AM	Helium valve opened
5/23/2010	11:11:38 AM	Helium MFC set to  500.000000
5/23/2010	11:11:38 AM	H2 MFC set to  0.000000
5/23/2010	11:11:38 AM	BCl3 MFC set to  0.000000
5/23/2010	11:11:38 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:11:38 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:11:38 AM	Tube furnace set to 0
5/23/2010	11:12:26 AM	Helium valve closed
5/23/2010	11:12:26 AM	H2 valve closed
5/23/2010	11:12:26 AM	BCl3 valve closed
5/23/2010	11:12:26 AM	PH3 valve closed
5/23/2010	11:12:26 AM	SiCl4 pre valve closed
5/23/2010	11:12:26 AM	SiCl4 post valve closed
5/23/2010	11:12:26 AM	Main Vac valve closed
5/23/2010	11:12:26 AM	Bypass valve closed
5/23/2010	11:12:26 AM	Bubbler valve closed
5/23/2010	11:12:26 AM	Helium MFC set to  0.000000
5/23/2010	11:12:26 AM	H2 MFC set to  0.000000
5/23/2010	11:12:26 AM	BCl3 MFC set to  0.000000
5/23/2010	11:12:26 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:12:26 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:12:26 AM	Tube furnace set to 0
5/23/2010	11:12:41 AM	Helium valve closed
5/23/2010	11:12:41 AM	H2 valve closed
5/23/2010	11:12:41 AM	BCl3 valve closed
5/23/2010	11:12:41 AM	PH3 valve closed
5/23/2010	11:12:41 AM	SiCl4 pre valve closed
5/23/2010	11:12:41 AM	SiCl4 post valve closed
5/23/2010	11:12:41 AM	Main Vac valve closed
5/23/2010	11:12:41 AM	Bubbler valve closed
5/23/2010	11:12:41 AM	Bypass valve opened
5/23/2010	11:12:41 AM	Helium MFC set to  0.000000
5/23/2010	11:12:41 AM	H2 MFC set to  0.000000
5/23/2010	11:12:41 AM	BCl3 MFC set to  0.000000
5/23/2010	11:12:41 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:12:41 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:12:41 AM	Tube furnace set to 0
5/23/2010	11:13:10 AM	Helium valve closed
5/23/2010	11:13:10 AM	H2 valve closed
5/23/2010	11:13:10 AM	BCl3 valve closed
5/23/2010	11:13:10 AM	PH3 valve closed
5/23/2010	11:13:10 AM	SiCl4 pre valve closed
5/23/2010	11:13:10 AM	SiCl4 post valve closed
5/23/2010	11:13:10 AM	Bubbler valve closed
5/23/2010	11:13:10 AM	Main Vac valve opened
5/23/2010	11:13:10 AM	Bypass valve opened
5/23/2010	11:13:10 AM	Helium MFC set to  0.000000
5/23/2010	11:13:10 AM	H2 MFC set to  0.000000
5/23/2010	11:13:10 AM	BCl3 MFC set to  0.000000
5/23/2010	11:13:10 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:13:10 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:13:10 AM	Tube furnace set to 0
5/23/2010	11:13:12 AM	Helium valve closed
5/23/2010	11:13:12 AM	H2 valve closed
5/23/2010	11:13:12 AM	BCl3 valve closed
5/23/2010	11:13:12 AM	PH3 valve closed
5/23/2010	11:13:12 AM	SiCl4 pre valve closed
5/23/2010	11:13:12 AM	SiCl4 post valve closed
5/23/2010	11:13:12 AM	Bubbler valve closed
5/23/2010	11:13:12 AM	Main Vac valve opened
5/23/2010	11:13:12 AM	Bypass valve opened
5/23/2010	11:13:12 AM	Helium MFC set to  0.000000
5/23/2010	11:13:12 AM	H2 MFC set to  0.000000
5/23/2010	11:13:12 AM	BCl3 MFC set to  0.000000
5/23/2010	11:13:12 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:13:12 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:13:13 AM	Tube furnace set to 0
5/23/2010	11:13:14 AM	Run finished at 11:13 AM
5/23/2010	11:13:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	11:14:38 AM	Recipe started at 11:14 AM
5/23/2010	11:14:38 AM	Helium valve closed
5/23/2010	11:14:38 AM	H2 valve closed
5/23/2010	11:14:38 AM	BCl3 valve closed
5/23/2010	11:14:38 AM	PH3 valve closed
5/23/2010	11:14:38 AM	SiCl4 pre valve closed
5/23/2010	11:14:38 AM	SiCl4 post valve closed
5/23/2010	11:14:38 AM	Bubbler valve closed
5/23/2010	11:14:38 AM	Main Vac valve opened
5/23/2010	11:14:38 AM	Bypass valve opened
5/23/2010	11:14:38 AM	Helium MFC set to  0.000000
5/23/2010	11:14:38 AM	H2 MFC set to  0.000000
5/23/2010	11:14:38 AM	BCl3 MFC set to  0.000000
5/23/2010	11:14:38 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:14:38 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:14:39 AM	Tube furnace set to 0
5/23/2010	11:14:48 AM	H2 valve closed
5/23/2010	11:14:48 AM	BCl3 valve closed
5/23/2010	11:14:48 AM	PH3 valve closed
5/23/2010	11:14:48 AM	SiCl4 pre valve closed
5/23/2010	11:14:48 AM	SiCl4 post valve closed
5/23/2010	11:14:48 AM	Bubbler valve closed
5/23/2010	11:14:48 AM	Helium valve opened
5/23/2010	11:14:48 AM	Main Vac valve opened
5/23/2010	11:14:48 AM	Bypass valve opened
5/23/2010	11:14:48 AM	Helium MFC set to  100.000000
5/23/2010	11:14:48 AM	H2 MFC set to  0.000000
5/23/2010	11:14:48 AM	BCl3 MFC set to  0.000000
5/23/2010	11:14:48 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:14:48 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:14:48 AM	Tube furnace set to 0
5/23/2010	11:16:48 AM	Helium valve closed
5/23/2010	11:16:48 AM	H2 valve closed
5/23/2010	11:16:48 AM	BCl3 valve closed
5/23/2010	11:16:48 AM	PH3 valve closed
5/23/2010	11:16:48 AM	SiCl4 pre valve closed
5/23/2010	11:16:48 AM	SiCl4 post valve closed
5/23/2010	11:16:48 AM	Bubbler valve closed
5/23/2010	11:16:48 AM	Main Vac valve opened
5/23/2010	11:16:48 AM	Bypass valve opened
5/23/2010	11:16:48 AM	Helium MFC set to  0.000000
5/23/2010	11:16:48 AM	H2 MFC set to  0.000000
5/23/2010	11:16:48 AM	BCl3 MFC set to  0.000000
5/23/2010	11:16:48 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:16:48 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:16:48 AM	Tube furnace set to 0
5/23/2010	11:20:04 AM	H2 valve closed
5/23/2010	11:20:04 AM	BCl3 valve closed
5/23/2010	11:20:04 AM	PH3 valve closed
5/23/2010	11:20:04 AM	SiCl4 pre valve closed
5/23/2010	11:20:04 AM	SiCl4 post valve closed
5/23/2010	11:20:04 AM	Bubbler valve closed
5/23/2010	11:20:04 AM	Helium valve opened
5/23/2010	11:20:04 AM	Main Vac valve opened
5/23/2010	11:20:04 AM	Bypass valve opened
5/23/2010	11:20:04 AM	Helium MFC set to  100.000000
5/23/2010	11:20:04 AM	H2 MFC set to  0.000000
5/23/2010	11:20:04 AM	BCl3 MFC set to  0.000000
5/23/2010	11:20:04 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:20:04 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:20:04 AM	Tube furnace set to 0
5/23/2010	11:20:59 AM	Helium valve closed
5/23/2010	11:20:59 AM	H2 valve closed
5/23/2010	11:20:59 AM	BCl3 valve closed
5/23/2010	11:20:59 AM	PH3 valve closed
5/23/2010	11:20:59 AM	SiCl4 pre valve closed
5/23/2010	11:20:59 AM	SiCl4 post valve closed
5/23/2010	11:20:59 AM	Bubbler valve closed
5/23/2010	11:20:59 AM	Main Vac valve opened
5/23/2010	11:20:59 AM	Bypass valve opened
5/23/2010	11:20:59 AM	Helium MFC set to  0.000000
5/23/2010	11:20:59 AM	H2 MFC set to  0.000000
5/23/2010	11:20:59 AM	BCl3 MFC set to  0.000000
5/23/2010	11:20:59 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:20:59 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:21:00 AM	Tube furnace set to 0
5/23/2010	11:21:11 AM	Run finished at 11:21 AM
5/23/2010	11:22:10 AM	Main Vac valve closed
5/23/2010	11:22:12 AM	Bypass valve closed
5/23/2010	11:22:18 AM	Bypass valve opened
5/23/2010	11:22:19 AM	Main Vac valve opened
5/23/2010	11:22:30 AM	Recipe started at 11:22 AM
5/23/2010	11:22:30 AM	Helium valve closed
5/23/2010	11:22:30 AM	BCl3 valve closed
5/23/2010	11:22:30 AM	PH3 valve closed
5/23/2010	11:22:30 AM	SiCl4 pre valve closed
5/23/2010	11:22:30 AM	SiCl4 post valve closed
5/23/2010	11:22:30 AM	Main Vac valve closed
5/23/2010	11:22:30 AM	Bypass valve closed
5/23/2010	11:22:30 AM	Bubbler valve closed
5/23/2010	11:22:30 AM	H2 valve opened
5/23/2010	11:22:30 AM	Helium MFC set to  0.000000
5/23/2010	11:22:30 AM	H2 MFC set to  500.000000
5/23/2010	11:22:30 AM	BCl3 MFC set to  0.000000
5/23/2010	11:22:30 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:22:30 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:22:31 AM	Tube furnace set to 0
5/23/2010	11:23:53 AM	Helium valve closed
5/23/2010	11:23:53 AM	BCl3 valve closed
5/23/2010	11:23:53 AM	PH3 valve closed
5/23/2010	11:23:53 AM	SiCl4 pre valve closed
5/23/2010	11:23:53 AM	SiCl4 post valve closed
5/23/2010	11:23:53 AM	Main Vac valve closed
5/23/2010	11:23:53 AM	Bypass valve closed
5/23/2010	11:23:53 AM	H2 valve opened
5/23/2010	11:23:53 AM	Bubbler valve opened
5/23/2010	11:23:53 AM	Helium MFC set to  0.000000
5/23/2010	11:23:53 AM	H2 MFC set to  400.000000
5/23/2010	11:23:53 AM	BCl3 MFC set to  0.000000
5/23/2010	11:23:53 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:23:53 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:23:53 AM	Tube furnace set to 1005
5/23/2010	11:41:53 AM	Helium valve closed
5/23/2010	11:41:53 AM	BCl3 valve closed
5/23/2010	11:41:53 AM	PH3 valve closed
5/23/2010	11:41:53 AM	SiCl4 pre valve closed
5/23/2010	11:41:53 AM	SiCl4 post valve closed
5/23/2010	11:41:53 AM	Main Vac valve closed
5/23/2010	11:41:53 AM	Bypass valve closed
5/23/2010	11:41:53 AM	H2 valve opened
5/23/2010	11:41:53 AM	Bubbler valve opened
5/23/2010	11:41:53 AM	Helium MFC set to  0.000000
5/23/2010	11:41:53 AM	H2 MFC set to  400.000000
5/23/2010	11:41:53 AM	BCl3 MFC set to  0.000000
5/23/2010	11:41:53 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:41:53 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:41:53 AM	Tube furnace set to 1000
5/23/2010	11:43:53 AM	Helium valve closed
5/23/2010	11:43:53 AM	H2 valve closed
5/23/2010	11:43:53 AM	PH3 valve closed
5/23/2010	11:43:53 AM	Main Vac valve closed
5/23/2010	11:43:53 AM	Bypass valve closed
5/23/2010	11:43:53 AM	BCl3 valve opened
5/23/2010	11:43:53 AM	SiCl4 pre valve opened
5/23/2010	11:43:53 AM	SiCl4 post valve opened
5/23/2010	11:43:53 AM	Bubbler valve opened
5/23/2010	11:43:53 AM	Helium MFC set to  0.000000
5/23/2010	11:43:53 AM	H2 MFC set to  0.000000
5/23/2010	11:43:53 AM	BCl3 MFC set to  35.000000
5/23/2010	11:43:53 AM	SiCl4 MFC set to  500.000000
5/23/2010	11:43:53 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:43:54 AM	Tube furnace set to 1000
5/23/2010	11:44:09 AM	Helium valve closed
5/23/2010	11:44:09 AM	PH3 valve closed
5/23/2010	11:44:09 AM	Main Vac valve closed
5/23/2010	11:44:09 AM	Bypass valve closed
5/23/2010	11:44:09 AM	H2 valve opened
5/23/2010	11:44:09 AM	BCl3 valve opened
5/23/2010	11:44:09 AM	SiCl4 pre valve opened
5/23/2010	11:44:09 AM	SiCl4 post valve opened
5/23/2010	11:44:09 AM	Bubbler valve opened
5/23/2010	11:44:09 AM	Helium MFC set to  0.000000
5/23/2010	11:44:09 AM	H2 MFC set to  500.000000
5/23/2010	11:44:09 AM	BCl3 MFC set to  35.000000
5/23/2010	11:44:09 AM	SiCl4 MFC set to  500.000000
5/23/2010	11:44:09 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:44:09 AM	Tube furnace set to 1000
5/23/2010	11:54:09 AM	H2 valve closed
5/23/2010	11:54:09 AM	BCl3 valve closed
5/23/2010	11:54:09 AM	There was an error trying to close the PH3 valve.  It remains opened. 
5/23/2010	11:54:20 AM	SiCl4 pre valve closed
5/23/2010	11:54:20 AM	SiCl4 post valve closed
5/23/2010	11:54:20 AM	Main Vac valve closed
5/23/2010	11:54:20 AM	Bypass valve closed
5/23/2010	11:54:20 AM	Helium valve opened
5/23/2010	11:54:20 AM	Bubbler valve opened
5/23/2010	11:54:20 AM	Helium MFC set to  400.000000
5/23/2010	11:54:20 AM	H2 MFC set to  0.000000
5/23/2010	11:54:20 AM	BCl3 MFC set to  0.000000
5/23/2010	11:54:20 AM	SiCl4 MFC set to  0.000000
5/23/2010	11:54:20 AM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:54:21 AM	Tube furnace set to 0
5/23/2010	12:09:25 PM	Helium valve closed
5/23/2010	12:09:25 PM	H2 valve closed
5/23/2010	12:09:25 PM	BCl3 valve closed
5/23/2010	12:09:25 PM	PH3 valve closed
5/23/2010	12:09:25 PM	SiCl4 pre valve closed
5/23/2010	12:09:25 PM	SiCl4 post valve closed
5/23/2010	12:09:25 PM	Main Vac valve closed
5/23/2010	12:09:25 PM	Bypass valve closed
5/23/2010	12:09:25 PM	Bubbler valve closed
5/23/2010	12:09:25 PM	Helium MFC set to  0.000000
5/23/2010	12:09:25 PM	H2 MFC set to  0.000000
5/23/2010	12:09:25 PM	BCl3 MFC set to  0.000000
5/23/2010	12:09:25 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:09:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:09:26 PM	Tube furnace set to 0
5/23/2010	12:09:26 PM	Run finished at 12:09 PM
5/23/2010	12:10:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:10:29 PM	Recipe started at 12:10 PM
5/23/2010	12:10:29 PM	Helium valve closed
5/23/2010	12:10:29 PM	H2 valve closed
5/23/2010	12:10:29 PM	BCl3 valve closed
5/23/2010	12:10:29 PM	PH3 valve closed
5/23/2010	12:10:29 PM	SiCl4 pre valve closed
5/23/2010	12:10:29 PM	SiCl4 post valve closed
5/23/2010	12:10:29 PM	Main Vac valve closed
5/23/2010	12:10:29 PM	Bubbler valve closed
5/23/2010	12:10:29 PM	Bypass valve opened
5/23/2010	12:10:29 PM	Helium MFC set to  0.000000
5/23/2010	12:10:29 PM	H2 MFC set to  0.000000
5/23/2010	12:10:29 PM	BCl3 MFC set to  0.000000
5/23/2010	12:10:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:10:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:10:29 PM	Tube furnace set to 0
5/23/2010	12:11:10 PM	Helium valve closed
5/23/2010	12:11:10 PM	H2 valve closed
5/23/2010	12:11:10 PM	BCl3 valve closed
5/23/2010	12:11:10 PM	PH3 valve closed
5/23/2010	12:11:11 PM	SiCl4 pre valve closed
5/23/2010	12:11:11 PM	SiCl4 post valve closed
5/23/2010	12:11:11 PM	Bubbler valve closed
5/23/2010	12:11:11 PM	Main Vac valve opened
5/23/2010	12:11:11 PM	Bypass valve opened
5/23/2010	12:11:11 PM	Helium MFC set to  0.000000
5/23/2010	12:11:11 PM	H2 MFC set to  0.000000
5/23/2010	12:11:11 PM	BCl3 MFC set to  0.000000
5/23/2010	12:11:11 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:11:11 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:11:11 PM	Tube furnace set to 0
5/23/2010	12:11:11 PM	Run finished at 12:11 PM
5/23/2010	12:11:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:24:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:24:47 PM	Recipe started at 12:24 PM
5/23/2010	12:24:47 PM	H2 valve closed
5/23/2010	12:24:47 PM	BCl3 valve closed
5/23/2010	12:24:47 PM	PH3 valve closed
5/23/2010	12:24:47 PM	SiCl4 pre valve closed
5/23/2010	12:24:47 PM	SiCl4 post valve closed
5/23/2010	12:24:47 PM	Main Vac valve closed
5/23/2010	12:24:47 PM	Bypass valve closed
5/23/2010	12:24:47 PM	Bubbler valve closed
5/23/2010	12:24:47 PM	Helium valve opened
5/23/2010	12:24:47 PM	Helium MFC set to  500.000000
5/23/2010	12:24:47 PM	H2 MFC set to  0.000000
5/23/2010	12:24:47 PM	BCl3 MFC set to  0.000000
5/23/2010	12:24:47 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:24:47 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:24:47 PM	Tube furnace set to 0
5/23/2010	12:26:06 PM	Helium valve closed
5/23/2010	12:26:06 PM	H2 valve closed
5/23/2010	12:26:06 PM	BCl3 valve closed
5/23/2010	12:26:06 PM	PH3 valve closed
5/23/2010	12:26:06 PM	SiCl4 pre valve closed
5/23/2010	12:26:06 PM	SiCl4 post valve closed
5/23/2010	12:26:06 PM	Main Vac valve closed
5/23/2010	12:26:06 PM	Bypass valve closed
5/23/2010	12:26:06 PM	Bubbler valve closed
5/23/2010	12:26:06 PM	Helium MFC set to  0.000000
5/23/2010	12:26:06 PM	H2 MFC set to  0.000000
5/23/2010	12:26:06 PM	BCl3 MFC set to  0.000000
5/23/2010	12:26:06 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:26:06 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:26:06 PM	Tube furnace set to 0
5/23/2010	12:26:06 PM	Run finished at 12:26 PM
5/23/2010	12:26:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	12:27:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:27:26 PM	Recipe started at 12:27 PM
5/23/2010	12:27:26 PM	Helium valve closed
5/23/2010	12:27:26 PM	H2 valve closed
5/23/2010	12:27:26 PM	BCl3 valve closed
5/23/2010	12:27:26 PM	PH3 valve closed
5/23/2010	12:27:26 PM	SiCl4 pre valve closed
5/23/2010	12:27:26 PM	SiCl4 post valve closed
5/23/2010	12:27:26 PM	Main Vac valve closed
5/23/2010	12:27:26 PM	Bubbler valve closed
5/23/2010	12:27:26 PM	Bypass valve opened
5/23/2010	12:27:26 PM	Helium MFC set to  0.000000
5/23/2010	12:27:26 PM	H2 MFC set to  0.000000
5/23/2010	12:27:26 PM	BCl3 MFC set to  0.000000
5/23/2010	12:27:26 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:27:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:27:26 PM	Tube furnace set to 0
5/23/2010	12:28:09 PM	Helium valve closed
5/23/2010	12:28:09 PM	H2 valve closed
5/23/2010	12:28:09 PM	BCl3 valve closed
5/23/2010	12:28:09 PM	PH3 valve closed
5/23/2010	12:28:09 PM	SiCl4 pre valve closed
5/23/2010	12:28:09 PM	SiCl4 post valve closed
5/23/2010	12:28:09 PM	Bubbler valve closed
5/23/2010	12:28:09 PM	Main Vac valve opened
5/23/2010	12:28:09 PM	Bypass valve opened
5/23/2010	12:28:09 PM	Helium MFC set to  0.000000
5/23/2010	12:28:09 PM	H2 MFC set to  0.000000
5/23/2010	12:28:09 PM	BCl3 MFC set to  0.000000
5/23/2010	12:28:09 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:28:09 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:28:10 PM	Tube furnace set to 0
5/23/2010	12:28:10 PM	Run finished at 12:28 PM
5/23/2010	12:28:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	12:31:03 PM	Recipe started at 12:31 PM
5/23/2010	12:31:03 PM	Helium valve closed
5/23/2010	12:31:03 PM	H2 valve closed
5/23/2010	12:31:03 PM	BCl3 valve closed
5/23/2010	12:31:03 PM	PH3 valve closed
5/23/2010	12:31:03 PM	SiCl4 pre valve closed
5/23/2010	12:31:03 PM	SiCl4 post valve closed
5/23/2010	12:31:03 PM	Main Vac valve closed
5/23/2010	12:31:03 PM	Bubbler valve closed
5/23/2010	12:31:03 PM	Bypass valve opened
5/23/2010	12:31:03 PM	Helium MFC set to  0.000000
5/23/2010	12:31:03 PM	H2 MFC set to  0.000000
5/23/2010	12:31:03 PM	BCl3 MFC set to  0.000000
5/23/2010	12:31:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:31:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:31:04 PM	Tube furnace set to 0
5/23/2010	12:31:04 PM	Helium valve closed
5/23/2010	12:31:04 PM	H2 valve closed
5/23/2010	12:31:04 PM	BCl3 valve closed
5/23/2010	12:31:04 PM	PH3 valve closed
5/23/2010	12:31:04 PM	SiCl4 pre valve closed
5/23/2010	12:31:04 PM	SiCl4 post valve closed
5/23/2010	12:31:04 PM	Bubbler valve closed
5/23/2010	12:31:04 PM	Main Vac valve opened
5/23/2010	12:31:04 PM	Bypass valve opened
5/23/2010	12:31:04 PM	Helium MFC set to  0.000000
5/23/2010	12:31:04 PM	H2 MFC set to  0.000000
5/23/2010	12:31:04 PM	BCl3 MFC set to  0.000000
5/23/2010	12:31:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:31:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:31:04 PM	Tube furnace set to 0
5/23/2010	12:31:13 PM	H2 valve closed
5/23/2010	12:31:13 PM	BCl3 valve closed
5/23/2010	12:31:13 PM	PH3 valve closed
5/23/2010	12:31:13 PM	SiCl4 pre valve closed
5/23/2010	12:31:13 PM	SiCl4 post valve closed
5/23/2010	12:31:13 PM	Bubbler valve closed
5/23/2010	12:31:13 PM	Helium valve opened
5/23/2010	12:31:13 PM	Main Vac valve opened
5/23/2010	12:31:13 PM	Bypass valve opened
5/23/2010	12:31:13 PM	Helium MFC set to  100.000000
5/23/2010	12:31:13 PM	H2 MFC set to  0.000000
5/23/2010	12:31:13 PM	BCl3 MFC set to  0.000000
5/23/2010	12:31:13 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:31:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:31:13 PM	Tube furnace set to 0
5/23/2010	12:33:13 PM	Helium valve closed
5/23/2010	12:33:13 PM	H2 valve closed
5/23/2010	12:33:13 PM	BCl3 valve closed
5/23/2010	12:33:13 PM	PH3 valve closed
5/23/2010	12:33:13 PM	SiCl4 pre valve closed
5/23/2010	12:33:13 PM	SiCl4 post valve closed
5/23/2010	12:33:13 PM	Bubbler valve closed
5/23/2010	12:33:13 PM	Main Vac valve opened
5/23/2010	12:33:13 PM	Bypass valve opened
5/23/2010	12:33:13 PM	Helium MFC set to  0.000000
5/23/2010	12:33:13 PM	H2 MFC set to  0.000000
5/23/2010	12:33:13 PM	BCl3 MFC set to  0.000000
5/23/2010	12:33:13 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:33:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:33:13 PM	Tube furnace set to 0
5/23/2010	12:34:17 PM	H2 valve closed
5/23/2010	12:34:17 PM	BCl3 valve closed
5/23/2010	12:34:17 PM	PH3 valve closed
5/23/2010	12:34:17 PM	SiCl4 pre valve closed
5/23/2010	12:34:17 PM	SiCl4 post valve closed
5/23/2010	12:34:17 PM	Bubbler valve closed
5/23/2010	12:34:17 PM	Helium valve opened
5/23/2010	12:34:17 PM	Main Vac valve opened
5/23/2010	12:34:17 PM	Bypass valve opened
5/23/2010	12:34:17 PM	Helium MFC set to  100.000000
5/23/2010	12:34:17 PM	H2 MFC set to  0.000000
5/23/2010	12:34:17 PM	BCl3 MFC set to  0.000000
5/23/2010	12:34:17 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:34:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:34:17 PM	Tube furnace set to 0
5/23/2010	12:36:17 PM	Helium valve closed
5/23/2010	12:36:17 PM	H2 valve closed
5/23/2010	12:36:17 PM	BCl3 valve closed
5/23/2010	12:36:17 PM	PH3 valve closed
5/23/2010	12:36:17 PM	SiCl4 pre valve closed
5/23/2010	12:36:17 PM	SiCl4 post valve closed
5/23/2010	12:36:17 PM	Bubbler valve closed
5/23/2010	12:36:17 PM	Main Vac valve opened
5/23/2010	12:36:17 PM	Bypass valve opened
5/23/2010	12:36:17 PM	Helium MFC set to  0.000000
5/23/2010	12:36:17 PM	H2 MFC set to  0.000000
5/23/2010	12:36:17 PM	BCl3 MFC set to  0.000000
5/23/2010	12:36:17 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:36:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:36:17 PM	Tube furnace set to 0
5/23/2010	12:39:00 PM	Run finished at 12:39 PM
5/23/2010	12:39:22 PM	Main Vac valve closed
5/23/2010	12:39:23 PM	Bypass valve closed
5/23/2010	12:39:44 PM	Bypass valve opened
5/23/2010	12:39:45 PM	Main Vac valve opened
5/23/2010	12:39:58 PM	Helium MFC set to  100.000000
5/23/2010	12:39:59 PM	Helium valve opened
5/23/2010	12:40:13 PM	Helium MFC set to  0.000000
5/23/2010	12:40:13 PM	Helium valve closed
5/23/2010	12:41:26 PM	Recipe started at 12:41 PM
5/23/2010	12:41:26 PM	Helium valve closed
5/23/2010	12:41:26 PM	BCl3 valve closed
5/23/2010	12:41:26 PM	PH3 valve closed
5/23/2010	12:41:26 PM	SiCl4 pre valve closed
5/23/2010	12:41:26 PM	SiCl4 post valve closed
5/23/2010	12:41:26 PM	Main Vac valve closed
5/23/2010	12:41:26 PM	Bypass valve closed
5/23/2010	12:41:26 PM	Bubbler valve closed
5/23/2010	12:41:26 PM	H2 valve opened
5/23/2010	12:41:26 PM	Helium MFC set to  0.000000
5/23/2010	12:41:26 PM	H2 MFC set to  500.000000
5/23/2010	12:41:26 PM	BCl3 MFC set to  0.000000
5/23/2010	12:41:26 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:41:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:41:26 PM	Tube furnace set to 0
5/23/2010	12:42:45 PM	Helium valve closed
5/23/2010	12:42:45 PM	BCl3 valve closed
5/23/2010	12:42:45 PM	PH3 valve closed
5/23/2010	12:42:45 PM	SiCl4 pre valve closed
5/23/2010	12:42:45 PM	SiCl4 post valve closed
5/23/2010	12:42:45 PM	Main Vac valve closed
5/23/2010	12:42:45 PM	Bypass valve closed
5/23/2010	12:42:45 PM	H2 valve opened
5/23/2010	12:42:45 PM	Bubbler valve opened
5/23/2010	12:42:45 PM	Helium MFC set to  0.000000
5/23/2010	12:42:45 PM	H2 MFC set to  400.000000
5/23/2010	12:42:45 PM	BCl3 MFC set to  0.000000
5/23/2010	12:42:45 PM	SiCl4 MFC set to  0.000000
5/23/2010	12:42:45 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	12:42:45 PM	Tube furnace set to 1005
5/23/2010	1:01:45 PM	Helium valve closed
5/23/2010	1:01:45 PM	BCl3 valve closed
5/23/2010	1:01:45 PM	PH3 valve closed
5/23/2010	1:01:45 PM	SiCl4 pre valve closed
5/23/2010	1:01:45 PM	SiCl4 post valve closed
5/23/2010	1:01:45 PM	Main Vac valve closed
5/23/2010	1:01:45 PM	Bypass valve closed
5/23/2010	1:01:45 PM	H2 valve opened
5/23/2010	1:01:45 PM	Bubbler valve opened
5/23/2010	1:01:45 PM	Helium MFC set to  0.000000
5/23/2010	1:01:45 PM	H2 MFC set to  400.000000
5/23/2010	1:01:45 PM	BCl3 MFC set to  0.000000
5/23/2010	1:01:45 PM	SiCl4 MFC set to  0.000000
5/23/2010	1:01:45 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:01:46 PM	Tube furnace set to 1002
5/23/2010	1:03:46 PM	Helium valve closed
5/23/2010	1:03:46 PM	H2 valve closed
5/23/2010	1:03:46 PM	PH3 valve closed
5/23/2010	1:03:46 PM	Main Vac valve closed
5/23/2010	1:03:46 PM	Bypass valve closed
5/23/2010	1:03:46 PM	BCl3 valve opened
5/23/2010	1:03:46 PM	SiCl4 pre valve opened
5/23/2010	1:03:46 PM	SiCl4 post valve opened
5/23/2010	1:03:46 PM	Bubbler valve opened
5/23/2010	1:03:46 PM	Helium MFC set to  0.000000
5/23/2010	1:03:46 PM	H2 MFC set to  0.000000
5/23/2010	1:03:46 PM	BCl3 MFC set to  35.000000
5/23/2010	1:03:46 PM	SiCl4 MFC set to  500.000000
5/23/2010	1:03:46 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:03:46 PM	Tube furnace set to 1002
5/23/2010	1:03:56 PM	Helium valve closed
5/23/2010	1:03:56 PM	PH3 valve closed
5/23/2010	1:03:56 PM	Main Vac valve closed
5/23/2010	1:03:56 PM	Bypass valve closed
5/23/2010	1:03:56 PM	H2 valve opened
5/23/2010	1:03:56 PM	BCl3 valve opened
5/23/2010	1:03:56 PM	SiCl4 pre valve opened
5/23/2010	1:03:56 PM	SiCl4 post valve opened
5/23/2010	1:03:56 PM	Bubbler valve opened
5/23/2010	1:03:56 PM	Helium MFC set to  0.000000
5/23/2010	1:03:56 PM	H2 MFC set to  500.000000
5/23/2010	1:03:56 PM	BCl3 MFC set to  35.000000
5/23/2010	1:03:56 PM	SiCl4 MFC set to  500.000000
5/23/2010	1:03:56 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:03:56 PM	Tube furnace set to 1002
5/23/2010	1:23:56 PM	H2 valve closed
5/23/2010	1:23:56 PM	BCl3 valve closed
5/23/2010	1:23:56 PM	PH3 valve closed
5/23/2010	1:23:56 PM	SiCl4 pre valve closed
5/23/2010	1:23:56 PM	SiCl4 post valve closed
5/23/2010	1:23:56 PM	Main Vac valve closed
5/23/2010	1:23:56 PM	Bypass valve closed
5/23/2010	1:23:56 PM	Helium valve opened
5/23/2010	1:23:56 PM	Bubbler valve opened
5/23/2010	1:23:56 PM	Helium MFC set to  400.000000
5/23/2010	1:23:56 PM	H2 MFC set to  0.000000
5/23/2010	1:23:56 PM	BCl3 MFC set to  0.000000
5/23/2010	1:23:56 PM	SiCl4 MFC set to  0.000000
5/23/2010	1:23:56 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:23:56 PM	Tube furnace set to 0
5/23/2010	1:43:56 PM	Helium valve closed
5/23/2010	1:43:56 PM	H2 valve closed
5/23/2010	1:43:56 PM	BCl3 valve closed
5/23/2010	1:43:56 PM	PH3 valve closed
5/23/2010	1:43:56 PM	SiCl4 pre valve closed
5/23/2010	1:43:56 PM	SiCl4 post valve closed
5/23/2010	1:43:56 PM	Main Vac valve closed
5/23/2010	1:43:56 PM	Bypass valve closed
5/23/2010	1:43:56 PM	Bubbler valve closed
5/23/2010	1:43:56 PM	Helium MFC set to  0.000000
5/23/2010	1:43:56 PM	H2 MFC set to  0.000000
5/23/2010	1:43:56 PM	BCl3 MFC set to  0.000000
5/23/2010	1:43:56 PM	SiCl4 MFC set to  0.000000
5/23/2010	1:43:56 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:43:56 PM	Tube furnace set to 0
5/23/2010	1:43:56 PM	Run finished at 1:43 PM
5/23/2010	1:47:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	1:47:10 PM	Recipe started at 1:47 PM
5/23/2010	1:47:10 PM	Helium valve closed
5/23/2010	1:47:10 PM	H2 valve closed
5/23/2010	1:47:10 PM	BCl3 valve closed
5/23/2010	1:47:10 PM	PH3 valve closed
5/23/2010	1:47:10 PM	SiCl4 pre valve closed
5/23/2010	1:47:10 PM	SiCl4 post valve closed
5/23/2010	1:47:10 PM	Main Vac valve closed
5/23/2010	1:47:10 PM	Bubbler valve closed
5/23/2010	1:47:10 PM	Bypass valve opened
5/23/2010	1:47:10 PM	Helium MFC set to  0.000000
5/23/2010	1:47:10 PM	H2 MFC set to  0.000000
5/23/2010	1:47:10 PM	BCl3 MFC set to  0.000000
5/23/2010	1:47:10 PM	SiCl4 MFC set to  0.000000
5/23/2010	1:47:10 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:47:10 PM	Tube furnace set to 0
5/23/2010	1:47:53 PM	Helium valve closed
5/23/2010	1:47:53 PM	H2 valve closed
5/23/2010	1:47:53 PM	BCl3 valve closed
5/23/2010	1:47:53 PM	PH3 valve closed
5/23/2010	1:47:53 PM	SiCl4 pre valve closed
5/23/2010	1:47:53 PM	SiCl4 post valve closed
5/23/2010	1:47:53 PM	Bubbler valve closed
5/23/2010	1:47:53 PM	Main Vac valve opened
5/23/2010	1:47:53 PM	Bypass valve opened
5/23/2010	1:47:53 PM	Helium MFC set to  0.000000
5/23/2010	1:47:53 PM	H2 MFC set to  0.000000
5/23/2010	1:47:53 PM	BCl3 MFC set to  0.000000
5/23/2010	1:47:53 PM	SiCl4 MFC set to  0.000000
5/23/2010	1:47:53 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	1:47:53 PM	Tube furnace set to 0
5/23/2010	1:47:53 PM	Run finished at 1:47 PM
5/23/2010	1:47:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	2:02:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	2:02:13 PM	Recipe started at 2:02 PM
5/23/2010	2:02:13 PM	H2 valve closed
5/23/2010	2:02:13 PM	BCl3 valve closed
5/23/2010	2:02:13 PM	PH3 valve closed
5/23/2010	2:02:13 PM	SiCl4 pre valve closed
5/23/2010	2:02:13 PM	SiCl4 post valve closed
5/23/2010	2:02:13 PM	Main Vac valve closed
5/23/2010	2:02:13 PM	Bypass valve closed
5/23/2010	2:02:13 PM	Bubbler valve closed
5/23/2010	2:02:13 PM	Helium valve opened
5/23/2010	2:02:13 PM	Helium MFC set to  500.000000
5/23/2010	2:02:13 PM	H2 MFC set to  0.000000
5/23/2010	2:02:13 PM	BCl3 MFC set to  0.000000
5/23/2010	2:02:13 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:02:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:02:13 PM	Tube furnace set to 0
5/23/2010	2:03:32 PM	Helium valve closed
5/23/2010	2:03:32 PM	H2 valve closed
5/23/2010	2:03:32 PM	BCl3 valve closed
5/23/2010	2:03:32 PM	PH3 valve closed
5/23/2010	2:03:32 PM	SiCl4 pre valve closed
5/23/2010	2:03:32 PM	SiCl4 post valve closed
5/23/2010	2:03:32 PM	Main Vac valve closed
5/23/2010	2:03:32 PM	Bypass valve closed
5/23/2010	2:03:32 PM	Bubbler valve closed
5/23/2010	2:03:32 PM	Helium MFC set to  0.000000
5/23/2010	2:03:32 PM	H2 MFC set to  0.000000
5/23/2010	2:03:32 PM	BCl3 MFC set to  0.000000
5/23/2010	2:03:32 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:03:32 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:03:32 PM	Tube furnace set to 0
5/23/2010	2:03:32 PM	Run finished at 2:03 PM
5/23/2010	2:03:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	2:05:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	2:05:04 PM	Recipe started at 2:05 PM
5/23/2010	2:05:04 PM	Helium valve closed
5/23/2010	2:05:04 PM	H2 valve closed
5/23/2010	2:05:04 PM	BCl3 valve closed
5/23/2010	2:05:04 PM	PH3 valve closed
5/23/2010	2:05:04 PM	SiCl4 pre valve closed
5/23/2010	2:05:04 PM	SiCl4 post valve closed
5/23/2010	2:05:04 PM	Main Vac valve closed
5/23/2010	2:05:04 PM	Bubbler valve closed
5/23/2010	2:05:04 PM	Bypass valve opened
5/23/2010	2:05:04 PM	Helium MFC set to  0.000000
5/23/2010	2:05:04 PM	H2 MFC set to  0.000000
5/23/2010	2:05:04 PM	BCl3 MFC set to  0.000000
5/23/2010	2:05:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:05:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:05:04 PM	Tube furnace set to 0
5/23/2010	2:05:47 PM	Helium valve closed
5/23/2010	2:05:47 PM	H2 valve closed
5/23/2010	2:05:47 PM	BCl3 valve closed
5/23/2010	2:05:47 PM	PH3 valve closed
5/23/2010	2:05:47 PM	SiCl4 pre valve closed
5/23/2010	2:05:47 PM	SiCl4 post valve closed
5/23/2010	2:05:47 PM	Bubbler valve closed
5/23/2010	2:05:47 PM	Main Vac valve opened
5/23/2010	2:05:47 PM	Bypass valve opened
5/23/2010	2:05:47 PM	Helium MFC set to  0.000000
5/23/2010	2:05:48 PM	H2 MFC set to  0.000000
5/23/2010	2:05:48 PM	BCl3 MFC set to  0.000000
5/23/2010	2:05:48 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:05:48 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:05:48 PM	Tube furnace set to 0
5/23/2010	2:05:48 PM	Run finished at 2:05 PM
5/23/2010	2:05:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	2:07:33 PM	Recipe started at 2:07 PM
5/23/2010	2:07:33 PM	H2 valve closed
5/23/2010	2:07:33 PM	BCl3 valve closed
5/23/2010	2:07:33 PM	PH3 valve closed
5/23/2010	2:07:33 PM	SiCl4 pre valve closed
5/23/2010	2:07:33 PM	SiCl4 post valve closed
5/23/2010	2:07:33 PM	Bubbler valve closed
5/23/2010	2:07:33 PM	Helium valve opened
5/23/2010	2:07:33 PM	Main Vac valve opened
5/23/2010	2:07:33 PM	Bypass valve opened
5/23/2010	2:07:33 PM	Helium MFC set to  100.000000
5/23/2010	2:07:33 PM	H2 MFC set to  0.000000
5/23/2010	2:07:33 PM	BCl3 MFC set to  0.000000
5/23/2010	2:07:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:07:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:07:33 PM	Tube furnace set to 0
5/23/2010	2:09:33 PM	Helium valve closed
5/23/2010	2:09:33 PM	H2 valve closed
5/23/2010	2:09:33 PM	BCl3 valve closed
5/23/2010	2:09:33 PM	PH3 valve closed
5/23/2010	2:09:33 PM	SiCl4 pre valve closed
5/23/2010	2:09:33 PM	SiCl4 post valve closed
5/23/2010	2:09:33 PM	Bubbler valve closed
5/23/2010	2:09:33 PM	Main Vac valve opened
5/23/2010	2:09:33 PM	Bypass valve opened
5/23/2010	2:09:33 PM	Helium MFC set to  0.000000
5/23/2010	2:09:33 PM	H2 MFC set to  0.000000
5/23/2010	2:09:33 PM	BCl3 MFC set to  0.000000
5/23/2010	2:09:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:09:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:09:34 PM	Tube furnace set to 0
5/23/2010	2:14:34 PM	H2 valve closed
5/23/2010	2:14:34 PM	BCl3 valve closed
5/23/2010	2:14:34 PM	PH3 valve closed
5/23/2010	2:14:34 PM	SiCl4 pre valve closed
5/23/2010	2:14:34 PM	SiCl4 post valve closed
5/23/2010	2:14:34 PM	Bubbler valve closed
5/23/2010	2:14:34 PM	Helium valve opened
5/23/2010	2:14:34 PM	Main Vac valve opened
5/23/2010	2:14:34 PM	Bypass valve opened
5/23/2010	2:14:34 PM	Helium MFC set to  100.000000
5/23/2010	2:14:34 PM	H2 MFC set to  0.000000
5/23/2010	2:14:34 PM	BCl3 MFC set to  0.000000
5/23/2010	2:14:34 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:14:34 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:14:34 PM	Tube furnace set to 0
5/23/2010	2:15:57 PM	Helium valve closed
5/23/2010	2:15:57 PM	H2 valve closed
5/23/2010	2:15:57 PM	BCl3 valve closed
5/23/2010	2:15:57 PM	PH3 valve closed
5/23/2010	2:15:57 PM	SiCl4 pre valve closed
5/23/2010	2:15:57 PM	SiCl4 post valve closed
5/23/2010	2:15:57 PM	Bubbler valve closed
5/23/2010	2:15:57 PM	Main Vac valve opened
5/23/2010	2:15:57 PM	Bypass valve opened
5/23/2010	2:15:57 PM	Helium MFC set to  0.000000
5/23/2010	2:15:57 PM	H2 MFC set to  0.000000
5/23/2010	2:15:57 PM	BCl3 MFC set to  0.000000
5/23/2010	2:15:57 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:15:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:15:57 PM	Tube furnace set to 0
5/23/2010	2:16:39 PM	Run finished at 2:16 PM
5/23/2010	2:16:47 PM	Main Vac valve closed
5/23/2010	2:16:49 PM	Bypass valve closed
5/23/2010	2:16:54 PM	Bypass valve opened
5/23/2010	2:16:55 PM	Main Vac valve opened
5/23/2010	2:17:03 PM	Helium MFC set to  100.000000
5/23/2010	2:17:04 PM	Helium valve opened
5/23/2010	2:18:12 PM	Helium MFC set to  0.000000
5/23/2010	2:18:13 PM	Helium valve closed
5/23/2010	2:19:28 PM	Recipe started at 2:19 PM
5/23/2010	2:19:28 PM	Helium valve closed
5/23/2010	2:19:28 PM	BCl3 valve closed
5/23/2010	2:19:28 PM	PH3 valve closed
5/23/2010	2:19:28 PM	SiCl4 pre valve closed
5/23/2010	2:19:28 PM	SiCl4 post valve closed
5/23/2010	2:19:28 PM	Main Vac valve closed
5/23/2010	2:19:28 PM	Bypass valve closed
5/23/2010	2:19:28 PM	Bubbler valve closed
5/23/2010	2:19:28 PM	H2 valve opened
5/23/2010	2:19:28 PM	Helium MFC set to  0.000000
5/23/2010	2:19:28 PM	H2 MFC set to  500.000000
5/23/2010	2:19:28 PM	BCl3 MFC set to  0.000000
5/23/2010	2:19:28 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:19:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:19:28 PM	Tube furnace set to 0
5/23/2010	2:20:48 PM	Helium valve closed
5/23/2010	2:20:48 PM	BCl3 valve closed
5/23/2010	2:20:48 PM	PH3 valve closed
5/23/2010	2:20:48 PM	SiCl4 pre valve closed
5/23/2010	2:20:48 PM	SiCl4 post valve closed
5/23/2010	2:20:48 PM	Main Vac valve closed
5/23/2010	2:20:48 PM	Bypass valve closed
5/23/2010	2:20:48 PM	H2 valve opened
5/23/2010	2:20:48 PM	Bubbler valve opened
5/23/2010	2:20:48 PM	Helium MFC set to  0.000000
5/23/2010	2:20:48 PM	H2 MFC set to  400.000000
5/23/2010	2:20:48 PM	BCl3 MFC set to  0.000000
5/23/2010	2:20:48 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:20:48 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:20:48 PM	Tube furnace set to 1005
5/23/2010	2:39:48 PM	Helium valve closed
5/23/2010	2:39:48 PM	BCl3 valve closed
5/23/2010	2:39:48 PM	PH3 valve closed
5/23/2010	2:39:48 PM	SiCl4 pre valve closed
5/23/2010	2:39:48 PM	SiCl4 post valve closed
5/23/2010	2:39:48 PM	Main Vac valve closed
5/23/2010	2:39:48 PM	Bypass valve closed
5/23/2010	2:39:48 PM	H2 valve opened
5/23/2010	2:39:48 PM	Bubbler valve opened
5/23/2010	2:39:48 PM	Helium MFC set to  0.000000
5/23/2010	2:39:48 PM	H2 MFC set to  400.000000
5/23/2010	2:39:48 PM	BCl3 MFC set to  0.000000
5/23/2010	2:39:48 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:39:48 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:39:48 PM	Tube furnace set to 1002
5/23/2010	2:42:18 PM	Helium valve closed
5/23/2010	2:42:18 PM	H2 valve closed
5/23/2010	2:42:18 PM	PH3 valve closed
5/23/2010	2:42:18 PM	Main Vac valve closed
5/23/2010	2:42:18 PM	Bypass valve closed
5/23/2010	2:42:18 PM	BCl3 valve opened
5/23/2010	2:42:18 PM	SiCl4 pre valve opened
5/23/2010	2:42:18 PM	SiCl4 post valve opened
5/23/2010	2:42:18 PM	Bubbler valve opened
5/23/2010	2:42:18 PM	Helium MFC set to  0.000000
5/23/2010	2:42:18 PM	H2 MFC set to  0.000000
5/23/2010	2:42:18 PM	BCl3 MFC set to  35.000000
5/23/2010	2:42:18 PM	SiCl4 MFC set to  500.000000
5/23/2010	2:42:18 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:42:18 PM	Tube furnace set to 1000
5/23/2010	2:42:28 PM	Helium valve closed
5/23/2010	2:42:28 PM	PH3 valve closed
5/23/2010	2:42:28 PM	Main Vac valve closed
5/23/2010	2:42:28 PM	Bypass valve closed
5/23/2010	2:42:28 PM	H2 valve opened
5/23/2010	2:42:28 PM	BCl3 valve opened
5/23/2010	2:42:28 PM	SiCl4 pre valve opened
5/23/2010	2:42:28 PM	SiCl4 post valve opened
5/23/2010	2:42:28 PM	Bubbler valve opened
5/23/2010	2:42:28 PM	Helium MFC set to  0.000000
5/23/2010	2:42:28 PM	H2 MFC set to  500.000000
5/23/2010	2:42:28 PM	BCl3 MFC set to  35.000000
5/23/2010	2:42:28 PM	SiCl4 MFC set to  500.000000
5/23/2010	2:42:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:42:28 PM	Tube furnace set to 1000
5/23/2010	2:57:28 PM	H2 valve closed
5/23/2010	2:57:28 PM	BCl3 valve closed
5/23/2010	2:57:29 PM	PH3 valve closed
5/23/2010	2:57:29 PM	SiCl4 pre valve closed
5/23/2010	2:57:29 PM	SiCl4 post valve closed
5/23/2010	2:57:29 PM	Main Vac valve closed
5/23/2010	2:57:29 PM	Bypass valve closed
5/23/2010	2:57:29 PM	Helium valve opened
5/23/2010	2:57:29 PM	Bubbler valve opened
5/23/2010	2:57:29 PM	Helium MFC set to  400.000000
5/23/2010	2:57:29 PM	H2 MFC set to  0.000000
5/23/2010	2:57:29 PM	BCl3 MFC set to  0.000000
5/23/2010	2:57:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	2:57:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	2:57:29 PM	Tube furnace set to 0
5/23/2010	3:12:43 PM	Helium valve closed
5/23/2010	3:12:43 PM	H2 valve closed
5/23/2010	3:12:43 PM	BCl3 valve closed
5/23/2010	3:12:43 PM	PH3 valve closed
5/23/2010	3:12:43 PM	SiCl4 pre valve closed
5/23/2010	3:12:43 PM	SiCl4 post valve closed
5/23/2010	3:12:43 PM	Main Vac valve closed
5/23/2010	3:12:43 PM	Bypass valve closed
5/23/2010	3:12:43 PM	Bubbler valve closed
5/23/2010	3:12:43 PM	Helium MFC set to  0.000000
5/23/2010	3:12:43 PM	H2 MFC set to  0.000000
5/23/2010	3:12:43 PM	BCl3 MFC set to  0.000000
5/23/2010	3:12:43 PM	SiCl4 MFC set to  0.000000
5/23/2010	3:12:43 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	3:12:43 PM	Tube furnace set to 0
5/23/2010	3:12:44 PM	Run finished at 3:12 PM
5/23/2010	3:15:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	3:15:43 PM	Recipe started at 3:15 PM
5/23/2010	3:15:43 PM	Helium valve closed
5/23/2010	3:15:43 PM	H2 valve closed
5/23/2010	3:15:43 PM	BCl3 valve closed
5/23/2010	3:15:43 PM	PH3 valve closed
5/23/2010	3:15:43 PM	SiCl4 pre valve closed
5/23/2010	3:15:43 PM	SiCl4 post valve closed
5/23/2010	3:15:43 PM	Main Vac valve closed
5/23/2010	3:15:43 PM	Bubbler valve closed
5/23/2010	3:15:43 PM	Bypass valve opened
5/23/2010	3:15:43 PM	Helium MFC set to  0.000000
5/23/2010	3:15:43 PM	H2 MFC set to  0.000000
5/23/2010	3:15:43 PM	BCl3 MFC set to  0.000000
5/23/2010	3:15:43 PM	SiCl4 MFC set to  0.000000
5/23/2010	3:15:43 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	3:15:43 PM	Tube furnace set to 0
5/23/2010	3:16:25 PM	Helium valve closed
5/23/2010	3:16:25 PM	H2 valve closed
5/23/2010	3:16:25 PM	BCl3 valve closed
5/23/2010	3:16:25 PM	PH3 valve closed
5/23/2010	3:16:25 PM	SiCl4 pre valve closed
5/23/2010	3:16:25 PM	SiCl4 post valve closed
5/23/2010	3:16:25 PM	Bubbler valve closed
5/23/2010	3:16:25 PM	Main Vac valve opened
5/23/2010	3:16:25 PM	Bypass valve opened
5/23/2010	3:16:25 PM	Helium MFC set to  0.000000
5/23/2010	3:16:25 PM	H2 MFC set to  0.000000
5/23/2010	3:16:25 PM	BCl3 MFC set to  0.000000
5/23/2010	3:16:25 PM	SiCl4 MFC set to  0.000000
5/23/2010	3:16:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	3:16:25 PM	Tube furnace set to 0
5/23/2010	3:16:25 PM	Run finished at 3:16 PM
5/23/2010	3:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	5:22:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	5:22:35 PM	Recipe started at 5:22 PM
5/23/2010	5:22:35 PM	H2 valve closed
5/23/2010	5:22:35 PM	BCl3 valve closed
5/23/2010	5:22:35 PM	PH3 valve closed
5/23/2010	5:22:35 PM	SiCl4 pre valve closed
5/23/2010	5:22:35 PM	SiCl4 post valve closed
5/23/2010	5:22:35 PM	Main Vac valve closed
5/23/2010	5:22:35 PM	Bypass valve closed
5/23/2010	5:22:35 PM	Bubbler valve closed
5/23/2010	5:22:35 PM	Helium valve opened
5/23/2010	5:22:35 PM	Helium MFC set to  500.000000
5/23/2010	5:22:35 PM	H2 MFC set to  0.000000
5/23/2010	5:22:35 PM	BCl3 MFC set to  0.000000
5/23/2010	5:22:35 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:22:35 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:22:35 PM	Tube furnace set to 0
5/23/2010	5:23:52 PM	Helium valve closed
5/23/2010	5:23:52 PM	H2 valve closed
5/23/2010	5:23:52 PM	BCl3 valve closed
5/23/2010	5:23:52 PM	PH3 valve closed
5/23/2010	5:23:52 PM	SiCl4 pre valve closed
5/23/2010	5:23:52 PM	SiCl4 post valve closed
5/23/2010	5:23:52 PM	Main Vac valve closed
5/23/2010	5:23:52 PM	Bypass valve closed
5/23/2010	5:23:52 PM	Bubbler valve closed
5/23/2010	5:23:52 PM	Helium MFC set to  0.000000
5/23/2010	5:23:52 PM	H2 MFC set to  0.000000
5/23/2010	5:23:52 PM	BCl3 MFC set to  0.000000
5/23/2010	5:23:52 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:23:52 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:23:53 PM	Tube furnace set to 0
5/23/2010	5:23:53 PM	Run finished at 5:23 PM
5/23/2010	5:23:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	5:24:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	5:24:55 PM	Recipe started at 5:24 PM
5/23/2010	5:24:55 PM	Helium valve closed
5/23/2010	5:24:55 PM	H2 valve closed
5/23/2010	5:24:55 PM	BCl3 valve closed
5/23/2010	5:24:55 PM	PH3 valve closed
5/23/2010	5:24:55 PM	SiCl4 pre valve closed
5/23/2010	5:24:55 PM	SiCl4 post valve closed
5/23/2010	5:24:55 PM	Main Vac valve closed
5/23/2010	5:24:55 PM	Bubbler valve closed
5/23/2010	5:24:55 PM	Bypass valve opened
5/23/2010	5:24:55 PM	Helium MFC set to  0.000000
5/23/2010	5:24:55 PM	H2 MFC set to  0.000000
5/23/2010	5:24:55 PM	BCl3 MFC set to  0.000000
5/23/2010	5:24:55 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:24:55 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:24:55 PM	Tube furnace set to 0
5/23/2010	5:25:38 PM	Helium valve closed
5/23/2010	5:25:38 PM	H2 valve closed
5/23/2010	5:25:38 PM	BCl3 valve closed
5/23/2010	5:25:38 PM	PH3 valve closed
5/23/2010	5:25:38 PM	SiCl4 pre valve closed
5/23/2010	5:25:38 PM	SiCl4 post valve closed
5/23/2010	5:25:38 PM	Bubbler valve closed
5/23/2010	5:25:38 PM	Main Vac valve opened
5/23/2010	5:25:38 PM	Bypass valve opened
5/23/2010	5:25:38 PM	Helium MFC set to  0.000000
5/23/2010	5:25:38 PM	H2 MFC set to  0.000000
5/23/2010	5:25:38 PM	BCl3 MFC set to  0.000000
5/23/2010	5:25:38 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:25:38 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:25:38 PM	Tube furnace set to 0
5/23/2010	5:25:39 PM	Run finished at 5:25 PM
5/23/2010	5:25:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	5:27:29 PM	Recipe started at 5:27 PM
5/23/2010	5:27:29 PM	H2 valve closed
5/23/2010	5:27:29 PM	BCl3 valve closed
5/23/2010	5:27:29 PM	PH3 valve closed
5/23/2010	5:27:29 PM	SiCl4 pre valve closed
5/23/2010	5:27:29 PM	SiCl4 post valve closed
5/23/2010	5:27:29 PM	Bubbler valve closed
5/23/2010	5:27:29 PM	Helium valve opened
5/23/2010	5:27:29 PM	Main Vac valve opened
5/23/2010	5:27:29 PM	Bypass valve opened
5/23/2010	5:27:29 PM	Helium MFC set to  100.000000
5/23/2010	5:27:29 PM	H2 MFC set to  0.000000
5/23/2010	5:27:29 PM	BCl3 MFC set to  0.000000
5/23/2010	5:27:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:27:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:27:29 PM	Tube furnace set to 0
5/23/2010	5:29:29 PM	Helium valve closed
5/23/2010	5:29:29 PM	H2 valve closed
5/23/2010	5:29:29 PM	BCl3 valve closed
5/23/2010	5:29:29 PM	PH3 valve closed
5/23/2010	5:29:29 PM	SiCl4 pre valve closed
5/23/2010	5:29:29 PM	SiCl4 post valve closed
5/23/2010	5:29:29 PM	Bubbler valve closed
5/23/2010	5:29:29 PM	Main Vac valve opened
5/23/2010	5:29:29 PM	Bypass valve opened
5/23/2010	5:29:29 PM	Helium MFC set to  0.000000
5/23/2010	5:29:29 PM	H2 MFC set to  0.000000
5/23/2010	5:29:29 PM	BCl3 MFC set to  0.000000
5/23/2010	5:29:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:29:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:29:29 PM	Tube furnace set to 0
5/23/2010	5:33:01 PM	H2 valve closed
5/23/2010	5:33:01 PM	BCl3 valve closed
5/23/2010	5:33:01 PM	PH3 valve closed
5/23/2010	5:33:01 PM	SiCl4 pre valve closed
5/23/2010	5:33:01 PM	SiCl4 post valve closed
5/23/2010	5:33:01 PM	Bubbler valve closed
5/23/2010	5:33:01 PM	Helium valve opened
5/23/2010	5:33:01 PM	Main Vac valve opened
5/23/2010	5:33:01 PM	Bypass valve opened
5/23/2010	5:33:01 PM	Helium MFC set to  100.000000
5/23/2010	5:33:01 PM	H2 MFC set to  0.000000
5/23/2010	5:33:01 PM	BCl3 MFC set to  0.000000
5/23/2010	5:33:01 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:33:01 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:33:02 PM	Tube furnace set to 0
5/23/2010	5:35:02 PM	Helium valve closed
5/23/2010	5:35:02 PM	H2 valve closed
5/23/2010	5:35:02 PM	BCl3 valve closed
5/23/2010	5:35:02 PM	PH3 valve closed
5/23/2010	5:35:02 PM	SiCl4 pre valve closed
5/23/2010	5:35:02 PM	SiCl4 post valve closed
5/23/2010	5:35:02 PM	Bubbler valve closed
5/23/2010	5:35:02 PM	Main Vac valve opened
5/23/2010	5:35:02 PM	Bypass valve opened
5/23/2010	5:35:02 PM	Helium MFC set to  0.000000
5/23/2010	5:35:02 PM	H2 MFC set to  0.000000
5/23/2010	5:35:02 PM	BCl3 MFC set to  0.000000
5/23/2010	5:35:02 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:35:02 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:35:02 PM	Tube furnace set to 0
5/23/2010	5:35:22 PM	Run finished at 5:35 PM
5/23/2010	5:37:31 PM	Helium MFC set to  100.000000
5/23/2010	5:37:32 PM	Helium valve opened
5/23/2010	5:38:08 PM	Helium MFC set to  0.000000
5/23/2010	5:38:08 PM	Helium valve closed
5/23/2010	5:38:45 PM	Main Vac valve closed
5/23/2010	5:38:47 PM	Bypass valve closed
5/23/2010	5:38:53 PM	Bypass valve opened
5/23/2010	5:38:54 PM	Main Vac valve opened
5/23/2010	5:39:06 PM	Recipe started at 5:39 PM
5/23/2010	5:39:06 PM	Helium valve closed
5/23/2010	5:39:06 PM	BCl3 valve closed
5/23/2010	5:39:06 PM	PH3 valve closed
5/23/2010	5:39:06 PM	SiCl4 pre valve closed
5/23/2010	5:39:06 PM	SiCl4 post valve closed
5/23/2010	5:39:06 PM	Main Vac valve closed
5/23/2010	5:39:06 PM	Bypass valve closed
5/23/2010	5:39:06 PM	Bubbler valve closed
5/23/2010	5:39:06 PM	H2 valve opened
5/23/2010	5:39:06 PM	Helium MFC set to  0.000000
5/23/2010	5:39:06 PM	H2 MFC set to  500.000000
5/23/2010	5:39:06 PM	BCl3 MFC set to  0.000000
5/23/2010	5:39:06 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:39:06 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:39:06 PM	Tube furnace set to 200
5/23/2010	5:40:26 PM	Helium valve closed
5/23/2010	5:40:26 PM	BCl3 valve closed
5/23/2010	5:40:26 PM	PH3 valve closed
5/23/2010	5:40:26 PM	SiCl4 pre valve closed
5/23/2010	5:40:26 PM	SiCl4 post valve closed
5/23/2010	5:40:26 PM	Main Vac valve closed
5/23/2010	5:40:26 PM	Bypass valve closed
5/23/2010	5:40:26 PM	H2 valve opened
5/23/2010	5:40:26 PM	Bubbler valve opened
5/23/2010	5:40:26 PM	Helium MFC set to  0.000000
5/23/2010	5:40:26 PM	H2 MFC set to  400.000000
5/23/2010	5:40:26 PM	BCl3 MFC set to  0.000000
5/23/2010	5:40:26 PM	SiCl4 MFC set to  0.000000
5/23/2010	5:40:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	5:40:26 PM	Tube furnace set to 1005
5/23/2010	6:00:26 PM	Helium valve closed
5/23/2010	6:00:26 PM	BCl3 valve closed
5/23/2010	6:00:26 PM	PH3 valve closed
5/23/2010	6:00:26 PM	SiCl4 pre valve closed
5/23/2010	6:00:26 PM	SiCl4 post valve closed
5/23/2010	6:00:26 PM	Main Vac valve closed
5/23/2010	6:00:26 PM	Bypass valve closed
5/23/2010	6:00:26 PM	H2 valve opened
5/23/2010	6:00:26 PM	Bubbler valve opened
5/23/2010	6:00:26 PM	Helium MFC set to  0.000000
5/23/2010	6:00:26 PM	H2 MFC set to  400.000000
5/23/2010	6:00:26 PM	BCl3 MFC set to  0.000000
5/23/2010	6:00:26 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:00:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:00:27 PM	Tube furnace set to 1002
5/23/2010	6:02:27 PM	Helium valve closed
5/23/2010	6:02:27 PM	H2 valve closed
5/23/2010	6:02:27 PM	PH3 valve closed
5/23/2010	6:02:27 PM	Main Vac valve closed
5/23/2010	6:02:27 PM	Bypass valve closed
5/23/2010	6:02:27 PM	BCl3 valve opened
5/23/2010	6:02:27 PM	SiCl4 pre valve opened
5/23/2010	6:02:27 PM	SiCl4 post valve opened
5/23/2010	6:02:27 PM	Bubbler valve opened
5/23/2010	6:02:27 PM	Helium MFC set to  0.000000
5/23/2010	6:02:27 PM	H2 MFC set to  0.000000
5/23/2010	6:02:27 PM	BCl3 MFC set to  50.000000
5/23/2010	6:02:27 PM	SiCl4 MFC set to  500.000000
5/23/2010	6:02:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:02:27 PM	Tube furnace set to 1000
5/23/2010	6:02:37 PM	Helium valve closed
5/23/2010	6:02:37 PM	PH3 valve closed
5/23/2010	6:02:37 PM	Main Vac valve closed
5/23/2010	6:02:37 PM	Bypass valve closed
5/23/2010	6:02:37 PM	H2 valve opened
5/23/2010	6:02:37 PM	BCl3 valve opened
5/23/2010	6:02:37 PM	SiCl4 pre valve opened
5/23/2010	6:02:37 PM	SiCl4 post valve opened
5/23/2010	6:02:37 PM	Bubbler valve opened
5/23/2010	6:02:37 PM	Helium MFC set to  0.000000
5/23/2010	6:02:37 PM	H2 MFC set to  500.000000
5/23/2010	6:02:37 PM	BCl3 MFC set to  35.000000
5/23/2010	6:02:37 PM	SiCl4 MFC set to  500.000000
5/23/2010	6:02:37 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:02:37 PM	Tube furnace set to 1000
5/23/2010	6:12:37 PM	H2 valve closed
5/23/2010	6:12:37 PM	BCl3 valve closed
5/23/2010	6:12:37 PM	PH3 valve closed
5/23/2010	6:12:37 PM	SiCl4 pre valve closed
5/23/2010	6:12:37 PM	SiCl4 post valve closed
5/23/2010	6:12:37 PM	Main Vac valve closed
5/23/2010	6:12:37 PM	Bypass valve closed
5/23/2010	6:12:37 PM	Helium valve opened
5/23/2010	6:12:37 PM	Bubbler valve opened
5/23/2010	6:12:37 PM	Helium MFC set to  400.000000
5/23/2010	6:12:37 PM	H2 MFC set to  0.000000
5/23/2010	6:12:37 PM	BCl3 MFC set to  0.000000
5/23/2010	6:12:37 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:12:37 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:12:37 PM	Tube furnace set to 0
5/23/2010	6:32:37 PM	Helium valve closed
5/23/2010	6:32:37 PM	H2 valve closed
5/23/2010	6:32:37 PM	BCl3 valve closed
5/23/2010	6:32:37 PM	PH3 valve closed
5/23/2010	6:32:37 PM	SiCl4 pre valve closed
5/23/2010	6:32:37 PM	SiCl4 post valve closed
5/23/2010	6:32:37 PM	Main Vac valve closed
5/23/2010	6:32:37 PM	Bypass valve closed
5/23/2010	6:32:37 PM	Bubbler valve closed
5/23/2010	6:32:37 PM	Helium MFC set to  0.000000
5/23/2010	6:32:37 PM	H2 MFC set to  0.000000
5/23/2010	6:32:37 PM	BCl3 MFC set to  0.000000
5/23/2010	6:32:37 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:32:37 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:32:37 PM	Tube furnace set to 0
5/23/2010	6:32:38 PM	Run finished at 6:32 PM
5/23/2010	6:38:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	6:38:16 PM	Recipe started at 6:38 PM
5/23/2010	6:38:16 PM	H2 valve closed
5/23/2010	6:38:16 PM	BCl3 valve closed
5/23/2010	6:38:16 PM	PH3 valve closed
5/23/2010	6:38:16 PM	SiCl4 pre valve closed
5/23/2010	6:38:16 PM	SiCl4 post valve closed
5/23/2010	6:38:16 PM	Main Vac valve closed
5/23/2010	6:38:16 PM	Bypass valve closed
5/23/2010	6:38:16 PM	Bubbler valve closed
5/23/2010	6:38:16 PM	Helium valve opened
5/23/2010	6:38:16 PM	Helium MFC set to  500.000000
5/23/2010	6:38:16 PM	H2 MFC set to  0.000000
5/23/2010	6:38:16 PM	BCl3 MFC set to  0.000000
5/23/2010	6:38:16 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:38:16 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:38:16 PM	Tube furnace set to 0
5/23/2010	6:38:18 PM	Helium valve closed
5/23/2010	6:38:18 PM	H2 valve closed
5/23/2010	6:38:18 PM	BCl3 valve closed
5/23/2010	6:38:18 PM	PH3 valve closed
5/23/2010	6:38:18 PM	SiCl4 pre valve closed
5/23/2010	6:38:18 PM	SiCl4 post valve closed
5/23/2010	6:38:18 PM	Main Vac valve closed
5/23/2010	6:38:18 PM	Bypass valve closed
5/23/2010	6:38:18 PM	Bubbler valve closed
5/23/2010	6:38:18 PM	Helium MFC set to  0.000000
5/23/2010	6:38:18 PM	H2 MFC set to  0.000000
5/23/2010	6:38:18 PM	BCl3 MFC set to  0.000000
5/23/2010	6:38:18 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:38:18 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:38:18 PM	Tube furnace set to 0
5/23/2010	6:38:20 PM	Helium valve closed
5/23/2010	6:38:20 PM	H2 valve closed
5/23/2010	6:38:20 PM	BCl3 valve closed
5/23/2010	6:38:20 PM	PH3 valve closed
5/23/2010	6:38:20 PM	SiCl4 pre valve closed
5/23/2010	6:38:20 PM	SiCl4 post valve closed
5/23/2010	6:38:20 PM	Main Vac valve closed
5/23/2010	6:38:20 PM	Bubbler valve closed
5/23/2010	6:38:20 PM	Bypass valve opened
5/23/2010	6:38:20 PM	Helium MFC set to  0.000000
5/23/2010	6:38:20 PM	H2 MFC set to  0.000000
5/23/2010	6:38:20 PM	BCl3 MFC set to  0.000000
5/23/2010	6:38:20 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:38:20 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:38:20 PM	Tube furnace set to 0
5/23/2010	6:39:05 PM	Helium valve closed
5/23/2010	6:39:05 PM	H2 valve closed
5/23/2010	6:39:05 PM	BCl3 valve closed
5/23/2010	6:39:05 PM	PH3 valve closed
5/23/2010	6:39:05 PM	SiCl4 pre valve closed
5/23/2010	6:39:05 PM	SiCl4 post valve closed
5/23/2010	6:39:05 PM	Bubbler valve closed
5/23/2010	6:39:05 PM	Main Vac valve opened
5/23/2010	6:39:05 PM	Bypass valve opened
5/23/2010	6:39:05 PM	Helium MFC set to  0.000000
5/23/2010	6:39:05 PM	H2 MFC set to  0.000000
5/23/2010	6:39:05 PM	BCl3 MFC set to  0.000000
5/23/2010	6:39:05 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:39:05 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:39:05 PM	Tube furnace set to 0
5/23/2010	6:44:05 PM	H2 valve closed
5/23/2010	6:44:05 PM	BCl3 valve closed
5/23/2010	6:44:05 PM	PH3 valve closed
5/23/2010	6:44:05 PM	SiCl4 pre valve closed
5/23/2010	6:44:05 PM	SiCl4 post valve closed
5/23/2010	6:44:05 PM	Main Vac valve closed
5/23/2010	6:44:05 PM	Bypass valve closed
5/23/2010	6:44:05 PM	Bubbler valve closed
5/23/2010	6:44:05 PM	Helium valve opened
5/23/2010	6:44:05 PM	Helium MFC set to  500.000000
5/23/2010	6:44:05 PM	H2 MFC set to  0.000000
5/23/2010	6:44:05 PM	BCl3 MFC set to  0.000000
5/23/2010	6:44:05 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:44:05 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:44:05 PM	Tube furnace set to 0
5/23/2010	6:45:22 PM	Helium valve closed
5/23/2010	6:45:22 PM	H2 valve closed
5/23/2010	6:45:22 PM	BCl3 valve closed
5/23/2010	6:45:22 PM	PH3 valve closed
5/23/2010	6:45:22 PM	SiCl4 pre valve closed
5/23/2010	6:45:22 PM	SiCl4 post valve closed
5/23/2010	6:45:22 PM	Main Vac valve closed
5/23/2010	6:45:22 PM	Bypass valve closed
5/23/2010	6:45:22 PM	Bubbler valve closed
5/23/2010	6:45:22 PM	Helium MFC set to  0.000000
5/23/2010	6:45:22 PM	H2 MFC set to  0.000000
5/23/2010	6:45:22 PM	BCl3 MFC set to  0.000000
5/23/2010	6:45:22 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:45:22 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:45:22 PM	Tube furnace set to 0
5/23/2010	6:45:37 PM	Helium valve closed
5/23/2010	6:45:37 PM	H2 valve closed
5/23/2010	6:45:37 PM	BCl3 valve closed
5/23/2010	6:45:37 PM	PH3 valve closed
5/23/2010	6:45:37 PM	SiCl4 pre valve closed
5/23/2010	6:45:37 PM	SiCl4 post valve closed
5/23/2010	6:45:37 PM	Main Vac valve closed
5/23/2010	6:45:37 PM	Bubbler valve closed
5/23/2010	6:45:37 PM	Bypass valve opened
5/23/2010	6:45:37 PM	Helium MFC set to  0.000000
5/23/2010	6:45:37 PM	H2 MFC set to  0.000000
5/23/2010	6:45:37 PM	BCl3 MFC set to  0.000000
5/23/2010	6:45:37 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:45:37 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:45:37 PM	Tube furnace set to 0
5/23/2010	6:46:08 PM	Helium valve closed
5/23/2010	6:46:08 PM	H2 valve closed
5/23/2010	6:46:08 PM	BCl3 valve closed
5/23/2010	6:46:08 PM	PH3 valve closed
5/23/2010	6:46:08 PM	SiCl4 pre valve closed
5/23/2010	6:46:08 PM	SiCl4 post valve closed
5/23/2010	6:46:08 PM	Bubbler valve closed
5/23/2010	6:46:08 PM	Main Vac valve opened
5/23/2010	6:46:08 PM	Bypass valve opened
5/23/2010	6:46:08 PM	Helium MFC set to  0.000000
5/23/2010	6:46:08 PM	H2 MFC set to  0.000000
5/23/2010	6:46:08 PM	BCl3 MFC set to  0.000000
5/23/2010	6:46:08 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:46:08 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:46:08 PM	Tube furnace set to 0
5/23/2010	6:51:08 PM	H2 valve closed
5/23/2010	6:51:08 PM	BCl3 valve closed
5/23/2010	6:51:08 PM	PH3 valve closed
5/23/2010	6:51:08 PM	SiCl4 pre valve closed
5/23/2010	6:51:08 PM	SiCl4 post valve closed
5/23/2010	6:51:08 PM	Main Vac valve closed
5/23/2010	6:51:08 PM	Bypass valve closed
5/23/2010	6:51:08 PM	Bubbler valve closed
5/23/2010	6:51:08 PM	Helium valve opened
5/23/2010	6:51:08 PM	Helium MFC set to  500.000000
5/23/2010	6:51:08 PM	H2 MFC set to  0.000000
5/23/2010	6:51:08 PM	BCl3 MFC set to  0.000000
5/23/2010	6:51:08 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:51:08 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:51:08 PM	Tube furnace set to 0
5/23/2010	6:52:24 PM	Helium valve closed
5/23/2010	6:52:24 PM	H2 valve closed
5/23/2010	6:52:24 PM	BCl3 valve closed
5/23/2010	6:52:24 PM	PH3 valve closed
5/23/2010	6:52:24 PM	SiCl4 pre valve closed
5/23/2010	6:52:24 PM	SiCl4 post valve closed
5/23/2010	6:52:24 PM	Main Vac valve closed
5/23/2010	6:52:24 PM	Bypass valve closed
5/23/2010	6:52:24 PM	Bubbler valve closed
5/23/2010	6:52:24 PM	Helium MFC set to  0.000000
5/23/2010	6:52:24 PM	H2 MFC set to  0.000000
5/23/2010	6:52:24 PM	BCl3 MFC set to  0.000000
5/23/2010	6:52:24 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:52:24 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:52:24 PM	Tube furnace set to 0
5/23/2010	6:52:39 PM	Helium valve closed
5/23/2010	6:52:39 PM	H2 valve closed
5/23/2010	6:52:39 PM	BCl3 valve closed
5/23/2010	6:52:39 PM	PH3 valve closed
5/23/2010	6:52:39 PM	SiCl4 pre valve closed
5/23/2010	6:52:39 PM	SiCl4 post valve closed
5/23/2010	6:52:39 PM	Main Vac valve closed
5/23/2010	6:52:39 PM	Bubbler valve closed
5/23/2010	6:52:39 PM	Bypass valve opened
5/23/2010	6:52:39 PM	Helium MFC set to  0.000000
5/23/2010	6:52:39 PM	H2 MFC set to  0.000000
5/23/2010	6:52:39 PM	BCl3 MFC set to  0.000000
5/23/2010	6:52:39 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:52:39 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:52:40 PM	Tube furnace set to 0
5/23/2010	6:53:10 PM	Helium valve closed
5/23/2010	6:53:10 PM	H2 valve closed
5/23/2010	6:53:10 PM	BCl3 valve closed
5/23/2010	6:53:10 PM	PH3 valve closed
5/23/2010	6:53:10 PM	SiCl4 pre valve closed
5/23/2010	6:53:10 PM	SiCl4 post valve closed
5/23/2010	6:53:10 PM	Bubbler valve closed
5/23/2010	6:53:10 PM	Main Vac valve opened
5/23/2010	6:53:10 PM	Bypass valve opened
5/23/2010	6:53:10 PM	Helium MFC set to  0.000000
5/23/2010	6:53:10 PM	H2 MFC set to  0.000000
5/23/2010	6:53:10 PM	BCl3 MFC set to  0.000000
5/23/2010	6:53:10 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:53:10 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:53:10 PM	Tube furnace set to 0
5/23/2010	6:58:10 PM	Helium valve closed
5/23/2010	6:58:10 PM	H2 valve closed
5/23/2010	6:58:10 PM	BCl3 valve closed
5/23/2010	6:58:10 PM	PH3 valve closed
5/23/2010	6:58:10 PM	SiCl4 pre valve closed
5/23/2010	6:58:10 PM	SiCl4 post valve closed
5/23/2010	6:58:10 PM	Bubbler valve closed
5/23/2010	6:58:10 PM	Main Vac valve opened
5/23/2010	6:58:10 PM	Bypass valve opened
5/23/2010	6:58:10 PM	Helium MFC set to  0.000000
5/23/2010	6:58:10 PM	H2 MFC set to  0.000000
5/23/2010	6:58:10 PM	BCl3 MFC set to  0.000000
5/23/2010	6:58:10 PM	SiCl4 MFC set to  0.000000
5/23/2010	6:58:10 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	6:58:10 PM	Tube furnace set to 0
5/23/2010	6:58:11 PM	Run finished at 6:58 PM
5/23/2010	6:58:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	7:01:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	7:01:14 PM	Recipe started at 7:01 PM
5/23/2010	7:01:14 PM	H2 valve closed
5/23/2010	7:01:14 PM	BCl3 valve closed
5/23/2010	7:01:14 PM	PH3 valve closed
5/23/2010	7:01:14 PM	SiCl4 pre valve closed
5/23/2010	7:01:14 PM	SiCl4 post valve closed
5/23/2010	7:01:14 PM	Main Vac valve closed
5/23/2010	7:01:14 PM	Bypass valve closed
5/23/2010	7:01:14 PM	Bubbler valve closed
5/23/2010	7:01:14 PM	Helium valve opened
5/23/2010	7:01:14 PM	Helium MFC set to  500.000000
5/23/2010	7:01:14 PM	H2 MFC set to  0.000000
5/23/2010	7:01:14 PM	BCl3 MFC set to  0.000000
5/23/2010	7:01:14 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:01:14 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:01:14 PM	Tube furnace set to 0
5/23/2010	7:02:29 PM	Helium valve closed
5/23/2010	7:02:29 PM	H2 valve closed
5/23/2010	7:02:29 PM	BCl3 valve closed
5/23/2010	7:02:29 PM	PH3 valve closed
5/23/2010	7:02:29 PM	SiCl4 pre valve closed
5/23/2010	7:02:29 PM	SiCl4 post valve closed
5/23/2010	7:02:29 PM	Main Vac valve closed
5/23/2010	7:02:29 PM	Bypass valve closed
5/23/2010	7:02:29 PM	Bubbler valve closed
5/23/2010	7:02:29 PM	Helium MFC set to  0.000000
5/23/2010	7:02:29 PM	H2 MFC set to  0.000000
5/23/2010	7:02:29 PM	BCl3 MFC set to  0.000000
5/23/2010	7:02:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:02:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:02:29 PM	Tube furnace set to 0
5/23/2010	7:02:29 PM	Run finished at 7:02 PM
5/23/2010	7:02:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	7:04:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	7:04:31 PM	Recipe started at 7:04 PM
5/23/2010	7:04:31 PM	Helium valve closed
5/23/2010	7:04:31 PM	H2 valve closed
5/23/2010	7:04:31 PM	BCl3 valve closed
5/23/2010	7:04:31 PM	PH3 valve closed
5/23/2010	7:04:31 PM	SiCl4 pre valve closed
5/23/2010	7:04:31 PM	SiCl4 post valve closed
5/23/2010	7:04:31 PM	Main Vac valve closed
5/23/2010	7:04:31 PM	Bubbler valve closed
5/23/2010	7:04:31 PM	Bypass valve opened
5/23/2010	7:04:31 PM	Helium MFC set to  0.000000
5/23/2010	7:04:31 PM	H2 MFC set to  0.000000
5/23/2010	7:04:31 PM	BCl3 MFC set to  0.000000
5/23/2010	7:04:31 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:04:31 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:04:32 PM	Tube furnace set to 0
5/23/2010	7:05:14 PM	Helium valve closed
5/23/2010	7:05:14 PM	H2 valve closed
5/23/2010	7:05:14 PM	BCl3 valve closed
5/23/2010	7:05:14 PM	PH3 valve closed
5/23/2010	7:05:14 PM	SiCl4 pre valve closed
5/23/2010	7:05:14 PM	SiCl4 post valve closed
5/23/2010	7:05:14 PM	Bubbler valve closed
5/23/2010	7:05:14 PM	Main Vac valve opened
5/23/2010	7:05:14 PM	Bypass valve opened
5/23/2010	7:05:14 PM	Helium MFC set to  0.000000
5/23/2010	7:05:14 PM	H2 MFC set to  0.000000
5/23/2010	7:05:14 PM	BCl3 MFC set to  0.000000
5/23/2010	7:05:14 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:05:14 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:05:14 PM	Tube furnace set to 0
5/23/2010	7:05:14 PM	Run finished at 7:05 PM
5/23/2010	7:05:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	7:08:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	7:08:32 PM	Recipe started at 7:08 PM
5/23/2010	7:08:32 PM	H2 valve closed
5/23/2010	7:08:32 PM	BCl3 valve closed
5/23/2010	7:08:32 PM	PH3 valve closed
5/23/2010	7:08:32 PM	SiCl4 pre valve closed
5/23/2010	7:08:32 PM	SiCl4 post valve closed
5/23/2010	7:08:32 PM	Main Vac valve closed
5/23/2010	7:08:32 PM	Bypass valve closed
5/23/2010	7:08:32 PM	Bubbler valve closed
5/23/2010	7:08:32 PM	Helium valve opened
5/23/2010	7:08:32 PM	Helium MFC set to  500.000000
5/23/2010	7:08:32 PM	H2 MFC set to  0.000000
5/23/2010	7:08:32 PM	BCl3 MFC set to  0.000000
5/23/2010	7:08:32 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:08:32 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:08:32 PM	Tube furnace set to 0
5/23/2010	7:08:42 PM	Helium valve closed
5/23/2010	7:08:42 PM	H2 valve closed
5/23/2010	7:08:42 PM	BCl3 valve closed
5/23/2010	7:08:42 PM	PH3 valve closed
5/23/2010	7:08:42 PM	SiCl4 pre valve closed
5/23/2010	7:08:42 PM	SiCl4 post valve closed
5/23/2010	7:08:42 PM	Main Vac valve closed
5/23/2010	7:08:42 PM	Bypass valve closed
5/23/2010	7:08:42 PM	Bubbler valve closed
5/23/2010	7:08:42 PM	Helium MFC set to  0.000000
5/23/2010	7:08:42 PM	H2 MFC set to  0.000000
5/23/2010	7:08:42 PM	BCl3 MFC set to  0.000000
5/23/2010	7:08:42 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:08:42 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:08:42 PM	Tube furnace set to 0
5/23/2010	7:08:57 PM	Helium valve closed
5/23/2010	7:08:57 PM	H2 valve closed
5/23/2010	7:08:57 PM	BCl3 valve closed
5/23/2010	7:08:57 PM	PH3 valve closed
5/23/2010	7:08:57 PM	SiCl4 pre valve closed
5/23/2010	7:08:57 PM	SiCl4 post valve closed
5/23/2010	7:08:57 PM	Main Vac valve closed
5/23/2010	7:08:57 PM	Bubbler valve closed
5/23/2010	7:08:57 PM	Bypass valve opened
5/23/2010	7:08:57 PM	Helium MFC set to  0.000000
5/23/2010	7:08:57 PM	H2 MFC set to  0.000000
5/23/2010	7:08:57 PM	BCl3 MFC set to  0.000000
5/23/2010	7:08:57 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:08:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:08:57 PM	Tube furnace set to 0
5/23/2010	7:09:08 PM	Helium valve closed
5/23/2010	7:09:08 PM	H2 valve closed
5/23/2010	7:09:08 PM	BCl3 valve closed
5/23/2010	7:09:08 PM	PH3 valve closed
5/23/2010	7:09:08 PM	SiCl4 pre valve closed
5/23/2010	7:09:08 PM	SiCl4 post valve closed
5/23/2010	7:09:08 PM	Bubbler valve closed
5/23/2010	7:09:08 PM	Main Vac valve opened
5/23/2010	7:09:08 PM	Bypass valve opened
5/23/2010	7:09:08 PM	Helium MFC set to  0.000000
5/23/2010	7:09:08 PM	H2 MFC set to  0.000000
5/23/2010	7:09:08 PM	BCl3 MFC set to  0.000000
5/23/2010	7:09:08 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:09:08 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:09:08 PM	Tube furnace set to 0
5/23/2010	7:10:04 PM	H2 valve closed
5/23/2010	7:10:04 PM	BCl3 valve closed
5/23/2010	7:10:04 PM	PH3 valve closed
5/23/2010	7:10:04 PM	SiCl4 pre valve closed
5/23/2010	7:10:04 PM	SiCl4 post valve closed
5/23/2010	7:10:04 PM	Main Vac valve closed
5/23/2010	7:10:04 PM	Bypass valve closed
5/23/2010	7:10:04 PM	Bubbler valve closed
5/23/2010	7:10:04 PM	Helium valve opened
5/23/2010	7:10:04 PM	Helium MFC set to  500.000000
5/23/2010	7:10:04 PM	H2 MFC set to  0.000000
5/23/2010	7:10:04 PM	BCl3 MFC set to  0.000000
5/23/2010	7:10:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:10:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:10:04 PM	Tube furnace set to 0
5/23/2010	7:10:26 PM	Helium valve closed
5/23/2010	7:10:26 PM	H2 valve closed
5/23/2010	7:10:26 PM	BCl3 valve closed
5/23/2010	7:10:26 PM	PH3 valve closed
5/23/2010	7:10:26 PM	SiCl4 pre valve closed
5/23/2010	7:10:26 PM	SiCl4 post valve closed
5/23/2010	7:10:26 PM	Main Vac valve closed
5/23/2010	7:10:26 PM	Bypass valve closed
5/23/2010	7:10:26 PM	Bubbler valve closed
5/23/2010	7:10:26 PM	Helium MFC set to  0.000000
5/23/2010	7:10:26 PM	H2 MFC set to  0.000000
5/23/2010	7:10:26 PM	BCl3 MFC set to  0.000000
5/23/2010	7:10:26 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:10:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:10:26 PM	Tube furnace set to 0
5/23/2010	7:10:41 PM	Helium valve closed
5/23/2010	7:10:41 PM	H2 valve closed
5/23/2010	7:10:41 PM	BCl3 valve closed
5/23/2010	7:10:41 PM	PH3 valve closed
5/23/2010	7:10:41 PM	SiCl4 pre valve closed
5/23/2010	7:10:41 PM	SiCl4 post valve closed
5/23/2010	7:10:41 PM	Main Vac valve closed
5/23/2010	7:10:41 PM	Bubbler valve closed
5/23/2010	7:10:41 PM	Bypass valve opened
5/23/2010	7:10:42 PM	Helium MFC set to  0.000000
5/23/2010	7:10:42 PM	H2 MFC set to  0.000000
5/23/2010	7:10:42 PM	BCl3 MFC set to  0.000000
5/23/2010	7:10:42 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:10:42 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:10:42 PM	Tube furnace set to 0
5/23/2010	7:11:02 PM	Helium valve closed
5/23/2010	7:11:02 PM	H2 valve closed
5/23/2010	7:11:02 PM	BCl3 valve closed
5/23/2010	7:11:02 PM	PH3 valve closed
5/23/2010	7:11:02 PM	SiCl4 pre valve closed
5/23/2010	7:11:02 PM	SiCl4 post valve closed
5/23/2010	7:11:02 PM	Bubbler valve closed
5/23/2010	7:11:02 PM	Main Vac valve opened
5/23/2010	7:11:02 PM	Bypass valve opened
5/23/2010	7:11:02 PM	Helium MFC set to  0.000000
5/23/2010	7:11:02 PM	H2 MFC set to  0.000000
5/23/2010	7:11:02 PM	BCl3 MFC set to  0.000000
5/23/2010	7:11:02 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:11:02 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:11:03 PM	Tube furnace set to 0
5/23/2010	7:15:20 PM	H2 valve closed
5/23/2010	7:15:20 PM	BCl3 valve closed
5/23/2010	7:15:20 PM	PH3 valve closed
5/23/2010	7:15:20 PM	SiCl4 pre valve closed
5/23/2010	7:15:20 PM	SiCl4 post valve closed
5/23/2010	7:15:20 PM	Main Vac valve closed
5/23/2010	7:15:20 PM	Bypass valve closed
5/23/2010	7:15:20 PM	Bubbler valve closed
5/23/2010	7:15:20 PM	Helium valve opened
5/23/2010	7:15:20 PM	Helium MFC set to  500.000000
5/23/2010	7:15:20 PM	H2 MFC set to  0.000000
5/23/2010	7:15:20 PM	BCl3 MFC set to  0.000000
5/23/2010	7:15:20 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:15:20 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:15:21 PM	Tube furnace set to 0
5/23/2010	7:15:39 PM	Helium valve closed
5/23/2010	7:15:39 PM	H2 valve closed
5/23/2010	7:15:39 PM	BCl3 valve closed
5/23/2010	7:15:39 PM	PH3 valve closed
5/23/2010	7:15:39 PM	SiCl4 pre valve closed
5/23/2010	7:15:39 PM	SiCl4 post valve closed
5/23/2010	7:15:39 PM	Main Vac valve closed
5/23/2010	7:15:39 PM	Bypass valve closed
5/23/2010	7:15:39 PM	Bubbler valve closed
5/23/2010	7:15:39 PM	Helium MFC set to  0.000000
5/23/2010	7:15:39 PM	H2 MFC set to  0.000000
5/23/2010	7:15:39 PM	BCl3 MFC set to  0.000000
5/23/2010	7:15:39 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:15:39 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:15:39 PM	Tube furnace set to 0
5/23/2010	7:15:54 PM	Helium valve closed
5/23/2010	7:15:54 PM	H2 valve closed
5/23/2010	7:15:54 PM	BCl3 valve closed
5/23/2010	7:15:54 PM	PH3 valve closed
5/23/2010	7:15:54 PM	SiCl4 pre valve closed
5/23/2010	7:15:54 PM	SiCl4 post valve closed
5/23/2010	7:15:54 PM	Main Vac valve closed
5/23/2010	7:15:54 PM	Bubbler valve closed
5/23/2010	7:15:54 PM	Bypass valve opened
5/23/2010	7:15:54 PM	Helium MFC set to  0.000000
5/23/2010	7:15:54 PM	H2 MFC set to  0.000000
5/23/2010	7:15:54 PM	BCl3 MFC set to  0.000000
5/23/2010	7:15:54 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:15:54 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:15:54 PM	Tube furnace set to 0
5/23/2010	7:16:13 PM	Helium valve closed
5/23/2010	7:16:13 PM	H2 valve closed
5/23/2010	7:16:13 PM	BCl3 valve closed
5/23/2010	7:16:13 PM	PH3 valve closed
5/23/2010	7:16:13 PM	SiCl4 pre valve closed
5/23/2010	7:16:13 PM	SiCl4 post valve closed
5/23/2010	7:16:13 PM	Bubbler valve closed
5/23/2010	7:16:13 PM	Main Vac valve opened
5/23/2010	7:16:13 PM	Bypass valve opened
5/23/2010	7:16:13 PM	Helium MFC set to  0.000000
5/23/2010	7:16:13 PM	H2 MFC set to  0.000000
5/23/2010	7:16:13 PM	BCl3 MFC set to  0.000000
5/23/2010	7:16:13 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:16:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:16:13 PM	Tube furnace set to 0
5/23/2010	7:17:01 PM	Helium valve closed
5/23/2010	7:17:01 PM	H2 valve closed
5/23/2010	7:17:01 PM	BCl3 valve closed
5/23/2010	7:17:01 PM	PH3 valve closed
5/23/2010	7:17:01 PM	SiCl4 pre valve closed
5/23/2010	7:17:01 PM	SiCl4 post valve closed
5/23/2010	7:17:01 PM	Bubbler valve closed
5/23/2010	7:17:01 PM	Main Vac valve opened
5/23/2010	7:17:01 PM	Bypass valve opened
5/23/2010	7:17:01 PM	Helium MFC set to  0.000000
5/23/2010	7:17:01 PM	H2 MFC set to  0.000000
5/23/2010	7:17:01 PM	BCl3 MFC set to  0.000000
5/23/2010	7:17:01 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:17:01 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:17:01 PM	Tube furnace set to 0
5/23/2010	7:17:02 PM	Run finished at 7:17 PM
5/23/2010	7:17:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/23/2010	7:17:06 PM	Helium MFC set to  100.000000
5/23/2010	7:17:07 PM	Helium valve opened
5/23/2010	7:18:07 PM	Helium MFC set to  0.000000
5/23/2010	7:18:08 PM	Helium valve closed
5/23/2010	7:18:40 PM	Main Vac valve closed
5/23/2010	7:18:42 PM	Bypass valve closed
5/23/2010	7:18:58 PM	Bypass valve opened
5/23/2010	7:18:59 PM	Main Vac valve opened
5/23/2010	7:19:10 PM	Helium MFC set to  100.000000
5/23/2010	7:19:11 PM	Helium valve opened
5/23/2010	7:20:35 PM	Helium MFC set to  0.000000
5/23/2010	7:20:36 PM	Helium valve closed
5/23/2010	7:21:33 PM	Helium MFC set to  100.000000
5/23/2010	7:21:34 PM	Helium valve opened
5/23/2010	7:21:53 PM	Helium MFC set to  0.000000
5/23/2010	7:21:54 PM	Helium valve closed
5/23/2010	7:24:03 PM	Recipe started at 7:24 PM
5/23/2010	7:24:03 PM	Helium valve closed
5/23/2010	7:24:03 PM	BCl3 valve closed
5/23/2010	7:24:03 PM	PH3 valve closed
5/23/2010	7:24:03 PM	SiCl4 pre valve closed
5/23/2010	7:24:03 PM	SiCl4 post valve closed
5/23/2010	7:24:03 PM	Main Vac valve closed
5/23/2010	7:24:03 PM	Bypass valve closed
5/23/2010	7:24:03 PM	Bubbler valve closed
5/23/2010	7:24:03 PM	H2 valve opened
5/23/2010	7:24:03 PM	Helium MFC set to  0.000000
5/23/2010	7:24:03 PM	H2 MFC set to  500.000000
5/23/2010	7:24:03 PM	BCl3 MFC set to  0.000000
5/23/2010	7:24:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:24:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:24:03 PM	Tube furnace set to 200
5/23/2010	7:25:22 PM	Helium valve closed
5/23/2010	7:25:22 PM	BCl3 valve closed
5/23/2010	7:25:22 PM	PH3 valve closed
5/23/2010	7:25:22 PM	SiCl4 pre valve closed
5/23/2010	7:25:22 PM	SiCl4 post valve closed
5/23/2010	7:25:22 PM	Main Vac valve closed
5/23/2010	7:25:22 PM	Bypass valve closed
5/23/2010	7:25:22 PM	H2 valve opened
5/23/2010	7:25:22 PM	Bubbler valve opened
5/23/2010	7:25:22 PM	Helium MFC set to  0.000000
5/23/2010	7:25:22 PM	H2 MFC set to  400.000000
5/23/2010	7:25:22 PM	BCl3 MFC set to  0.000000
5/23/2010	7:25:22 PM	SiCl4 MFC set to  0.000000
5/23/2010	7:25:22 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:25:22 PM	Tube furnace set to 1003
5/23/2010	7:45:22 PM	Helium valve closed
5/23/2010	7:45:22 PM	H2 valve closed
5/23/2010	7:45:22 PM	PH3 valve closed
5/23/2010	7:45:22 PM	Main Vac valve closed
5/23/2010	7:45:22 PM	Bypass valve closed
5/23/2010	7:45:22 PM	BCl3 valve opened
5/23/2010	7:45:22 PM	SiCl4 pre valve opened
5/23/2010	7:45:22 PM	SiCl4 post valve opened
5/23/2010	7:45:22 PM	Bubbler valve opened
5/23/2010	7:45:22 PM	Helium MFC set to  0.000000
5/23/2010	7:45:22 PM	H2 MFC set to  0.000000
5/23/2010	7:45:22 PM	BCl3 MFC set to  50.000000
5/23/2010	7:45:22 PM	SiCl4 MFC set to  500.000000
5/23/2010	7:45:22 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:45:23 PM	Tube furnace set to 1003
5/23/2010	7:45:33 PM	Helium valve closed
5/23/2010	7:45:33 PM	PH3 valve closed
5/23/2010	7:45:33 PM	Main Vac valve closed
5/23/2010	7:45:33 PM	Bypass valve closed
5/23/2010	7:45:33 PM	H2 valve opened
5/23/2010	7:45:33 PM	BCl3 valve opened
5/23/2010	7:45:33 PM	SiCl4 pre valve opened
5/23/2010	7:45:33 PM	SiCl4 post valve opened
5/23/2010	7:45:33 PM	Bubbler valve opened
5/23/2010	7:45:33 PM	Helium MFC set to  0.000000
5/23/2010	7:45:33 PM	H2 MFC set to  485.000000
5/23/2010	7:45:33 PM	BCl3 MFC set to  50.000000
5/23/2010	7:45:33 PM	SiCl4 MFC set to  500.000000
5/23/2010	7:45:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	7:45:33 PM	Tube furnace set to 1003
5/23/2010	8:01:33 PM	Helium valve closed
5/23/2010	8:01:33 PM	BCl3 valve closed
5/23/2010	8:01:33 PM	PH3 valve closed
5/23/2010	8:01:33 PM	SiCl4 pre valve closed
5/23/2010	8:01:33 PM	SiCl4 post valve closed
5/23/2010	8:01:33 PM	Main Vac valve closed
5/23/2010	8:01:33 PM	Bypass valve closed
5/23/2010	8:01:33 PM	H2 valve opened
5/23/2010	8:01:33 PM	Bubbler valve opened
5/23/2010	8:01:33 PM	Helium MFC set to  0.000000
5/23/2010	8:01:33 PM	H2 MFC set to  500.000000
5/23/2010	8:01:33 PM	BCl3 MFC set to  0.000000
5/23/2010	8:01:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:01:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:01:33 PM	Tube furnace set to 0
5/23/2010	8:06:33 PM	H2 valve closed
5/23/2010	8:06:33 PM	BCl3 valve closed
5/23/2010	8:06:33 PM	PH3 valve closed
5/23/2010	8:06:33 PM	SiCl4 pre valve closed
5/23/2010	8:06:33 PM	SiCl4 post valve closed
5/23/2010	8:06:33 PM	Main Vac valve closed
5/23/2010	8:06:33 PM	Bypass valve closed
5/23/2010	8:06:33 PM	Helium valve opened
5/23/2010	8:06:33 PM	Bubbler valve opened
5/23/2010	8:06:33 PM	Helium MFC set to  400.000000
5/23/2010	8:06:33 PM	H2 MFC set to  0.000000
5/23/2010	8:06:33 PM	BCl3 MFC set to  0.000000
5/23/2010	8:06:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:06:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:06:33 PM	Tube furnace set to 0
5/23/2010	8:21:33 PM	Helium valve closed
5/23/2010	8:21:33 PM	H2 valve closed
5/23/2010	8:21:33 PM	BCl3 valve closed
5/23/2010	8:21:33 PM	PH3 valve closed
5/23/2010	8:21:33 PM	SiCl4 pre valve closed
5/23/2010	8:21:33 PM	SiCl4 post valve closed
5/23/2010	8:21:33 PM	Main Vac valve closed
5/23/2010	8:21:33 PM	Bypass valve closed
5/23/2010	8:21:33 PM	Bubbler valve closed
5/23/2010	8:21:33 PM	Helium MFC set to  0.000000
5/23/2010	8:21:33 PM	H2 MFC set to  0.000000
5/23/2010	8:21:33 PM	BCl3 MFC set to  0.000000
5/23/2010	8:21:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:21:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:21:33 PM	Tube furnace set to 0
5/23/2010	8:21:33 PM	Run finished at 8:21 PM
5/23/2010	8:38:38 PM	Recipe started at 8:38 PM
5/23/2010	8:38:38 PM	Helium valve closed
5/23/2010	8:38:38 PM	H2 valve closed
5/23/2010	8:38:38 PM	BCl3 valve closed
5/23/2010	8:38:38 PM	PH3 valve closed
5/23/2010	8:38:38 PM	SiCl4 pre valve closed
5/23/2010	8:38:38 PM	SiCl4 post valve closed
5/23/2010	8:38:38 PM	Main Vac valve closed
5/23/2010	8:38:38 PM	Bubbler valve closed
5/23/2010	8:38:38 PM	Bypass valve opened
5/23/2010	8:38:38 PM	Helium MFC set to  0.000000
5/23/2010	8:38:38 PM	H2 MFC set to  0.000000
5/23/2010	8:38:38 PM	BCl3 MFC set to  0.000000
5/23/2010	8:38:38 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:38:38 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:38:38 PM	Tube furnace set to 0
5/23/2010	8:39:25 PM	Helium valve closed
5/23/2010	8:39:25 PM	H2 valve closed
5/23/2010	8:39:25 PM	BCl3 valve closed
5/23/2010	8:39:25 PM	PH3 valve closed
5/23/2010	8:39:25 PM	SiCl4 pre valve closed
5/23/2010	8:39:25 PM	SiCl4 post valve closed
5/23/2010	8:39:25 PM	Bubbler valve closed
5/23/2010	8:39:25 PM	Main Vac valve opened
5/23/2010	8:39:25 PM	Bypass valve opened
5/23/2010	8:39:25 PM	Helium MFC set to  0.000000
5/23/2010	8:39:25 PM	H2 MFC set to  0.000000
5/23/2010	8:39:25 PM	BCl3 MFC set to  0.000000
5/23/2010	8:39:25 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:39:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:39:25 PM	Tube furnace set to 0
5/23/2010	8:42:03 PM	H2 valve closed
5/23/2010	8:42:03 PM	BCl3 valve closed
5/23/2010	8:42:03 PM	PH3 valve closed
5/23/2010	8:42:03 PM	SiCl4 pre valve closed
5/23/2010	8:42:03 PM	SiCl4 post valve closed
5/23/2010	8:42:03 PM	Bubbler valve closed
5/23/2010	8:42:03 PM	Helium valve opened
5/23/2010	8:42:03 PM	Main Vac valve opened
5/23/2010	8:42:03 PM	Bypass valve opened
5/23/2010	8:42:03 PM	Helium MFC set to  100.000000
5/23/2010	8:42:03 PM	H2 MFC set to  0.000000
5/23/2010	8:42:03 PM	BCl3 MFC set to  0.000000
5/23/2010	8:42:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:42:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:42:03 PM	Tube furnace set to 0
5/23/2010	8:44:03 PM	Helium valve closed
5/23/2010	8:44:03 PM	H2 valve closed
5/23/2010	8:44:03 PM	BCl3 valve closed
5/23/2010	8:44:03 PM	PH3 valve closed
5/23/2010	8:44:03 PM	SiCl4 pre valve closed
5/23/2010	8:44:03 PM	SiCl4 post valve closed
5/23/2010	8:44:03 PM	Bubbler valve closed
5/23/2010	8:44:03 PM	Main Vac valve opened
5/23/2010	8:44:03 PM	Bypass valve opened
5/23/2010	8:44:03 PM	Helium MFC set to  0.000000
5/23/2010	8:44:03 PM	H2 MFC set to  0.000000
5/23/2010	8:44:03 PM	BCl3 MFC set to  0.000000
5/23/2010	8:44:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:44:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:44:03 PM	Tube furnace set to 0
5/23/2010	8:49:03 PM	H2 valve closed
5/23/2010	8:49:03 PM	BCl3 valve closed
5/23/2010	8:49:03 PM	PH3 valve closed
5/23/2010	8:49:03 PM	SiCl4 pre valve closed
5/23/2010	8:49:03 PM	SiCl4 post valve closed
5/23/2010	8:49:03 PM	Bubbler valve closed
5/23/2010	8:49:03 PM	Helium valve opened
5/23/2010	8:49:03 PM	Main Vac valve opened
5/23/2010	8:49:03 PM	Bypass valve opened
5/23/2010	8:49:03 PM	Helium MFC set to  100.000000
5/23/2010	8:49:03 PM	H2 MFC set to  0.000000
5/23/2010	8:49:03 PM	BCl3 MFC set to  0.000000
5/23/2010	8:49:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:49:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:49:04 PM	Tube furnace set to 0
5/23/2010	8:51:04 PM	Helium valve closed
5/23/2010	8:51:04 PM	H2 valve closed
5/23/2010	8:51:04 PM	BCl3 valve closed
5/23/2010	8:51:04 PM	PH3 valve closed
5/23/2010	8:51:04 PM	SiCl4 pre valve closed
5/23/2010	8:51:04 PM	SiCl4 post valve closed
5/23/2010	8:51:04 PM	Bubbler valve closed
5/23/2010	8:51:04 PM	Main Vac valve opened
5/23/2010	8:51:04 PM	Bypass valve opened
5/23/2010	8:51:04 PM	Helium MFC set to  0.000000
5/23/2010	8:51:04 PM	H2 MFC set to  0.000000
5/23/2010	8:51:04 PM	BCl3 MFC set to  0.000000
5/23/2010	8:51:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	8:51:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	8:51:04 PM	Tube furnace set to 0
5/23/2010	8:54:04 PM	Run finished at 8:54 PM
5/23/2010	8:56:09 PM	Helium MFC set to  100.000000
5/23/2010	8:56:10 PM	Helium valve opened
5/23/2010	9:01:11 PM	Helium MFC set to  0.000000
5/23/2010	9:01:12 PM	Helium valve closed
5/23/2010	9:08:26 PM	Main Vac valve closed
5/23/2010	9:08:28 PM	Bypass valve closed
5/23/2010	9:08:40 PM	Bypass valve opened
5/23/2010	9:08:40 PM	Main Vac valve opened
5/23/2010	9:09:28 PM	Recipe started at 9:09 PM
5/23/2010	9:09:28 PM	Helium valve closed
5/23/2010	9:09:28 PM	BCl3 valve closed
5/23/2010	9:09:28 PM	PH3 valve closed
5/23/2010	9:09:28 PM	SiCl4 pre valve closed
5/23/2010	9:09:28 PM	SiCl4 post valve closed
5/23/2010	9:09:28 PM	Main Vac valve closed
5/23/2010	9:09:28 PM	Bypass valve closed
5/23/2010	9:09:28 PM	Bubbler valve closed
5/23/2010	9:09:28 PM	H2 valve opened
5/23/2010	9:09:28 PM	Helium MFC set to  0.000000
5/23/2010	9:09:28 PM	H2 MFC set to  500.000000
5/23/2010	9:09:28 PM	BCl3 MFC set to  0.000000
5/23/2010	9:09:28 PM	SiCl4 MFC set to  0.000000
5/23/2010	9:09:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:09:28 PM	Tube furnace set to 200
5/23/2010	9:10:46 PM	Helium valve closed
5/23/2010	9:10:46 PM	BCl3 valve closed
5/23/2010	9:10:46 PM	PH3 valve closed
5/23/2010	9:10:46 PM	SiCl4 pre valve closed
5/23/2010	9:10:46 PM	SiCl4 post valve closed
5/23/2010	9:10:46 PM	Main Vac valve closed
5/23/2010	9:10:46 PM	Bypass valve closed
5/23/2010	9:10:46 PM	H2 valve opened
5/23/2010	9:10:46 PM	Bubbler valve opened
5/23/2010	9:10:46 PM	Helium MFC set to  0.000000
5/23/2010	9:10:46 PM	H2 MFC set to  400.000000
5/23/2010	9:10:46 PM	BCl3 MFC set to  0.000000
5/23/2010	9:10:46 PM	SiCl4 MFC set to  0.000000
5/23/2010	9:10:46 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:10:46 PM	Tube furnace set to 1003
5/23/2010	9:32:26 PM	Helium valve closed
5/23/2010	9:32:26 PM	H2 valve closed
5/23/2010	9:32:26 PM	PH3 valve closed
5/23/2010	9:32:26 PM	Main Vac valve closed
5/23/2010	9:32:26 PM	Bypass valve closed
5/23/2010	9:32:26 PM	BCl3 valve opened
5/23/2010	9:32:26 PM	SiCl4 pre valve opened
5/23/2010	9:32:26 PM	SiCl4 post valve opened
5/23/2010	9:32:26 PM	Bubbler valve opened
5/23/2010	9:32:26 PM	Helium MFC set to  0.000000
5/23/2010	9:32:26 PM	H2 MFC set to  0.000000
5/23/2010	9:32:26 PM	BCl3 MFC set to  50.000000
5/23/2010	9:32:26 PM	SiCl4 MFC set to  500.000000
5/23/2010	9:32:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:32:27 PM	Tube furnace set to 1003
5/23/2010	9:32:37 PM	Helium valve closed
5/23/2010	9:32:37 PM	PH3 valve closed
5/23/2010	9:32:37 PM	Main Vac valve closed
5/23/2010	9:32:37 PM	Bypass valve closed
5/23/2010	9:32:37 PM	H2 valve opened
5/23/2010	9:32:37 PM	BCl3 valve opened
5/23/2010	9:32:37 PM	SiCl4 pre valve opened
5/23/2010	9:32:37 PM	SiCl4 post valve opened
5/23/2010	9:32:37 PM	Bubbler valve opened
5/23/2010	9:32:37 PM	Helium MFC set to  0.000000
5/23/2010	9:32:37 PM	H2 MFC set to  485.000000
5/23/2010	9:32:37 PM	BCl3 MFC set to  50.000000
5/23/2010	9:32:37 PM	SiCl4 MFC set to  500.000000
5/23/2010	9:32:37 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:32:37 PM	Tube furnace set to 1003
5/23/2010	9:50:57 PM	Helium valve closed
5/23/2010	9:50:57 PM	BCl3 valve closed
5/23/2010	9:50:57 PM	PH3 valve closed
5/23/2010	9:50:57 PM	SiCl4 pre valve closed
5/23/2010	9:50:57 PM	SiCl4 post valve closed
5/23/2010	9:50:57 PM	Main Vac valve closed
5/23/2010	9:50:57 PM	Bypass valve closed
5/23/2010	9:50:57 PM	H2 valve opened
5/23/2010	9:50:57 PM	Bubbler valve opened
5/23/2010	9:50:57 PM	Helium MFC set to  0.000000
5/23/2010	9:50:57 PM	H2 MFC set to  500.000000
5/23/2010	9:50:57 PM	BCl3 MFC set to  0.000000
5/23/2010	9:50:57 PM	SiCl4 MFC set to  0.000000
5/23/2010	9:50:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:50:57 PM	Tube furnace set to 0
5/23/2010	9:55:57 PM	H2 valve closed
5/23/2010	9:55:57 PM	BCl3 valve closed
5/23/2010	9:55:57 PM	PH3 valve closed
5/23/2010	9:55:57 PM	SiCl4 pre valve closed
5/23/2010	9:55:57 PM	SiCl4 post valve closed
5/23/2010	9:55:57 PM	Main Vac valve closed
5/23/2010	9:55:57 PM	Bypass valve closed
5/23/2010	9:55:57 PM	Helium valve opened
5/23/2010	9:55:57 PM	Bubbler valve opened
5/23/2010	9:55:57 PM	Helium MFC set to  400.000000
5/23/2010	9:55:57 PM	H2 MFC set to  0.000000
5/23/2010	9:55:57 PM	BCl3 MFC set to  0.000000
5/23/2010	9:55:57 PM	SiCl4 MFC set to  0.000000
5/23/2010	9:55:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	9:55:57 PM	Tube furnace set to 0
5/23/2010	10:10:57 PM	Helium valve closed
5/23/2010	10:10:57 PM	H2 valve closed
5/23/2010	10:10:57 PM	BCl3 valve closed
5/23/2010	10:10:57 PM	PH3 valve closed
5/23/2010	10:10:57 PM	SiCl4 pre valve closed
5/23/2010	10:10:57 PM	SiCl4 post valve closed
5/23/2010	10:10:57 PM	Main Vac valve closed
5/23/2010	10:10:57 PM	Bypass valve closed
5/23/2010	10:10:57 PM	Bubbler valve closed
5/23/2010	10:10:57 PM	Helium MFC set to  0.000000
5/23/2010	10:10:57 PM	H2 MFC set to  0.000000
5/23/2010	10:10:57 PM	BCl3 MFC set to  0.000000
5/23/2010	10:10:57 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:10:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:10:57 PM	Tube furnace set to 0
5/23/2010	10:10:57 PM	Run finished at 10:10 PM
5/23/2010	10:19:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:19:40 PM	Recipe started at 10:19 PM
5/23/2010	10:19:40 PM	Helium valve closed
5/23/2010	10:19:40 PM	H2 valve closed
5/23/2010	10:19:40 PM	BCl3 valve closed
5/23/2010	10:19:40 PM	PH3 valve closed
5/23/2010	10:19:40 PM	SiCl4 pre valve closed
5/23/2010	10:19:40 PM	SiCl4 post valve closed
5/23/2010	10:19:40 PM	Main Vac valve closed
5/23/2010	10:19:40 PM	Bubbler valve closed
5/23/2010	10:19:40 PM	Bypass valve opened
5/23/2010	10:19:40 PM	Helium MFC set to  0.000000
5/23/2010	10:19:40 PM	H2 MFC set to  0.000000
5/23/2010	10:19:40 PM	BCl3 MFC set to  0.000000
5/23/2010	10:19:40 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:19:40 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:19:40 PM	Tube furnace set to 0
5/23/2010	10:20:23 PM	Helium valve closed
5/23/2010	10:20:23 PM	H2 valve closed
5/23/2010	10:20:23 PM	BCl3 valve closed
5/23/2010	10:20:23 PM	PH3 valve closed
5/23/2010	10:20:23 PM	SiCl4 pre valve closed
5/23/2010	10:20:23 PM	SiCl4 post valve closed
5/23/2010	10:20:23 PM	Bubbler valve closed
5/23/2010	10:20:23 PM	Main Vac valve opened
5/23/2010	10:20:23 PM	Bypass valve opened
5/23/2010	10:20:23 PM	Helium MFC set to  0.000000
5/23/2010	10:20:23 PM	H2 MFC set to  0.000000
5/23/2010	10:20:23 PM	BCl3 MFC set to  0.000000
5/23/2010	10:20:23 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:20:23 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:20:24 PM	Tube furnace set to 0
5/23/2010	10:20:24 PM	Run finished at 10:20 PM
5/23/2010	10:20:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	10:29:29 PM	Recipe started at 10:29 PM
5/23/2010	10:29:29 PM	Helium valve closed
5/23/2010	10:29:29 PM	BCl3 valve closed
5/23/2010	10:29:29 PM	PH3 valve closed
5/23/2010	10:29:29 PM	SiCl4 pre valve closed
5/23/2010	10:29:29 PM	SiCl4 post valve closed
5/23/2010	10:29:29 PM	Main Vac valve closed
5/23/2010	10:29:29 PM	Bypass valve closed
5/23/2010	10:29:29 PM	Bubbler valve closed
5/23/2010	10:29:29 PM	H2 valve opened
5/23/2010	10:29:29 PM	Helium MFC set to  0.000000
5/23/2010	10:29:29 PM	H2 MFC set to  500.000000
5/23/2010	10:29:29 PM	BCl3 MFC set to  0.000000
5/23/2010	10:29:29 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:29:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:29:30 PM	Tube furnace set to 0
5/23/2010	10:29:32 PM	Run aborted at 10:29 PM
5/23/2010	10:29:32 PM	Helium valve closed
5/23/2010	10:29:32 PM	H2 valve closed
5/23/2010	10:29:32 PM	BCl3 valve closed
5/23/2010	10:29:32 PM	PH3 valve closed
5/23/2010	10:29:32 PM	SiCl4 pre valve closed
5/23/2010	10:29:32 PM	SiCl4 post valve closed
5/23/2010	10:29:32 PM	Bypass valve closed
5/23/2010	10:29:32 PM	Main Vac valve closed
5/23/2010	10:29:32 PM	Bubbler valve closed
5/23/2010	10:29:32 PM	Helium MFC set to  0.000000
5/23/2010	10:29:32 PM	H2 MFC set to  0.000000
5/23/2010	10:29:32 PM	BCl3 MFC set to  0.000000
5/23/2010	10:29:32 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:29:32 PM	Tube furnace set to 0
5/23/2010	10:30:07 PM	Recipe started at 10:30 PM
5/23/2010	10:30:07 PM	Helium valve closed
5/23/2010	10:30:07 PM	BCl3 valve closed
5/23/2010	10:30:07 PM	PH3 valve closed
5/23/2010	10:30:07 PM	SiCl4 pre valve closed
5/23/2010	10:30:07 PM	SiCl4 post valve closed
5/23/2010	10:30:07 PM	Main Vac valve closed
5/23/2010	10:30:07 PM	Bypass valve closed
5/23/2010	10:30:07 PM	Bubbler valve closed
5/23/2010	10:30:07 PM	H2 valve opened
5/23/2010	10:30:07 PM	Helium MFC set to  0.000000
5/23/2010	10:30:07 PM	H2 MFC set to  500.000000
5/23/2010	10:30:07 PM	BCl3 MFC set to  0.000000
5/23/2010	10:30:07 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:30:07 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:30:07 PM	Tube furnace set to 0
5/23/2010	10:31:24 PM	Helium valve closed
5/23/2010	10:31:24 PM	BCl3 valve closed
5/23/2010	10:31:24 PM	PH3 valve closed
5/23/2010	10:31:24 PM	SiCl4 pre valve closed
5/23/2010	10:31:24 PM	SiCl4 post valve closed
5/23/2010	10:31:24 PM	Main Vac valve closed
5/23/2010	10:31:24 PM	Bypass valve closed
5/23/2010	10:31:24 PM	H2 valve opened
5/23/2010	10:31:24 PM	Bubbler valve opened
5/23/2010	10:31:24 PM	Helium MFC set to  0.000000
5/23/2010	10:31:24 PM	H2 MFC set to  500.000000
5/23/2010	10:31:24 PM	BCl3 MFC set to  0.000000
5/23/2010	10:31:24 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:31:24 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:31:24 PM	Tube furnace set to 1000
5/23/2010	10:46:24 PM	Helium valve closed
5/23/2010	10:46:24 PM	BCl3 valve closed
5/23/2010	10:46:24 PM	PH3 valve closed
5/23/2010	10:46:24 PM	SiCl4 pre valve closed
5/23/2010	10:46:24 PM	SiCl4 post valve closed
5/23/2010	10:46:24 PM	Main Vac valve closed
5/23/2010	10:46:24 PM	Bypass valve closed
5/23/2010	10:46:24 PM	H2 valve opened
5/23/2010	10:46:24 PM	Bubbler valve opened
5/23/2010	10:46:24 PM	Helium MFC set to  0.000000
5/23/2010	10:46:24 PM	H2 MFC set to  500.000000
5/23/2010	10:46:24 PM	BCl3 MFC set to  0.000000
5/23/2010	10:46:24 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:46:24 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:46:25 PM	Tube furnace set to 1000
5/23/2010	10:51:25 PM	H2 valve closed
5/23/2010	10:51:25 PM	BCl3 valve closed
5/23/2010	10:51:25 PM	PH3 valve closed
5/23/2010	10:51:25 PM	SiCl4 pre valve closed
5/23/2010	10:51:25 PM	SiCl4 post valve closed
5/23/2010	10:51:25 PM	Main Vac valve closed
5/23/2010	10:51:25 PM	Bypass valve closed
5/23/2010	10:51:25 PM	Helium valve opened
5/23/2010	10:51:25 PM	Bubbler valve opened
5/23/2010	10:51:25 PM	Helium MFC set to  500.000000
5/23/2010	10:51:25 PM	H2 MFC set to  0.000000
5/23/2010	10:51:25 PM	BCl3 MFC set to  0.000000
5/23/2010	10:51:25 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:51:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:51:25 PM	Tube furnace set to 0
5/23/2010	10:56:25 PM	Helium valve closed
5/23/2010	10:56:25 PM	H2 valve closed
5/23/2010	10:56:25 PM	BCl3 valve closed
5/23/2010	10:56:25 PM	PH3 valve closed
5/23/2010	10:56:25 PM	SiCl4 pre valve closed
5/23/2010	10:56:25 PM	SiCl4 post valve closed
5/23/2010	10:56:25 PM	Main Vac valve closed
5/23/2010	10:56:25 PM	Bypass valve closed
5/23/2010	10:56:25 PM	Bubbler valve closed
5/23/2010	10:56:25 PM	Helium MFC set to  0.000000
5/23/2010	10:56:25 PM	H2 MFC set to  0.000000
5/23/2010	10:56:25 PM	BCl3 MFC set to  0.000000
5/23/2010	10:56:25 PM	SiCl4 MFC set to  0.000000
5/23/2010	10:56:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	10:56:25 PM	Tube furnace set to 0
5/23/2010	10:56:25 PM	Run finished at 10:56 PM
5/23/2010	11:36:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	11:36:31 PM	Recipe started at 11:36 PM
5/23/2010	11:36:31 PM	H2 valve closed
5/23/2010	11:36:31 PM	BCl3 valve closed
5/23/2010	11:36:31 PM	PH3 valve closed
5/23/2010	11:36:31 PM	SiCl4 pre valve closed
5/23/2010	11:36:31 PM	SiCl4 post valve closed
5/23/2010	11:36:31 PM	Main Vac valve closed
5/23/2010	11:36:31 PM	Bypass valve closed
5/23/2010	11:36:31 PM	Bubbler valve closed
5/23/2010	11:36:31 PM	Helium valve opened
5/23/2010	11:36:31 PM	Helium MFC set to  500.000000
5/23/2010	11:36:31 PM	H2 MFC set to  0.000000
5/23/2010	11:36:31 PM	BCl3 MFC set to  0.000000
5/23/2010	11:36:31 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:36:31 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:36:31 PM	Tube furnace set to 0
5/23/2010	11:36:41 PM	Helium valve closed
5/23/2010	11:36:41 PM	H2 valve closed
5/23/2010	11:36:41 PM	BCl3 valve closed
5/23/2010	11:36:41 PM	PH3 valve closed
5/23/2010	11:36:41 PM	SiCl4 pre valve closed
5/23/2010	11:36:41 PM	SiCl4 post valve closed
5/23/2010	11:36:41 PM	Main Vac valve closed
5/23/2010	11:36:41 PM	Bypass valve closed
5/23/2010	11:36:41 PM	Bubbler valve closed
5/23/2010	11:36:41 PM	Helium MFC set to  0.000000
5/23/2010	11:36:41 PM	H2 MFC set to  0.000000
5/23/2010	11:36:41 PM	BCl3 MFC set to  0.000000
5/23/2010	11:36:41 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:36:41 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:36:41 PM	Tube furnace set to 0
5/23/2010	11:36:41 PM	Run finished at 11:36 PM
5/23/2010	11:36:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2010	11:38:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	11:38:33 PM	Recipe started at 11:38 PM
5/23/2010	11:38:33 PM	Helium valve closed
5/23/2010	11:38:33 PM	H2 valve closed
5/23/2010	11:38:33 PM	BCl3 valve closed
5/23/2010	11:38:33 PM	PH3 valve closed
5/23/2010	11:38:33 PM	SiCl4 pre valve closed
5/23/2010	11:38:33 PM	SiCl4 post valve closed
5/23/2010	11:38:33 PM	Main Vac valve closed
5/23/2010	11:38:33 PM	Bubbler valve closed
5/23/2010	11:38:33 PM	Bypass valve opened
5/23/2010	11:38:33 PM	Helium MFC set to  0.000000
5/23/2010	11:38:33 PM	H2 MFC set to  0.000000
5/23/2010	11:38:33 PM	BCl3 MFC set to  0.000000
5/23/2010	11:38:33 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:38:33 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:38:33 PM	Tube furnace set to 0
5/23/2010	11:39:17 PM	Helium valve closed
5/23/2010	11:39:17 PM	H2 valve closed
5/23/2010	11:39:17 PM	BCl3 valve closed
5/23/2010	11:39:17 PM	PH3 valve closed
5/23/2010	11:39:17 PM	SiCl4 pre valve closed
5/23/2010	11:39:17 PM	SiCl4 post valve closed
5/23/2010	11:39:17 PM	Bubbler valve closed
5/23/2010	11:39:17 PM	Main Vac valve opened
5/23/2010	11:39:17 PM	Bypass valve opened
5/23/2010	11:39:17 PM	Helium MFC set to  0.000000
5/23/2010	11:39:17 PM	H2 MFC set to  0.000000
5/23/2010	11:39:17 PM	BCl3 MFC set to  0.000000
5/23/2010	11:39:17 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:39:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:39:17 PM	Tube furnace set to 0
5/23/2010	11:39:17 PM	Run finished at 11:39 PM
5/23/2010	11:39:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2010	11:39:59 PM	Recipe started at 11:39 PM
5/23/2010	11:39:59 PM	Helium valve closed
5/23/2010	11:39:59 PM	H2 valve closed
5/23/2010	11:39:59 PM	BCl3 valve closed
5/23/2010	11:39:59 PM	PH3 valve closed
5/23/2010	11:39:59 PM	SiCl4 pre valve closed
5/23/2010	11:39:59 PM	SiCl4 post valve closed
5/23/2010	11:39:59 PM	Bubbler valve closed
5/23/2010	11:39:59 PM	Main Vac valve opened
5/23/2010	11:39:59 PM	Bypass valve opened
5/23/2010	11:39:59 PM	Helium MFC set to  0.000000
5/23/2010	11:39:59 PM	H2 MFC set to  0.000000
5/23/2010	11:39:59 PM	BCl3 MFC set to  0.000000
5/23/2010	11:39:59 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:39:59 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:39:59 PM	Tube furnace set to 0
5/23/2010	11:40:03 PM	H2 valve closed
5/23/2010	11:40:03 PM	BCl3 valve closed
5/23/2010	11:40:03 PM	PH3 valve closed
5/23/2010	11:40:03 PM	SiCl4 pre valve closed
5/23/2010	11:40:03 PM	SiCl4 post valve closed
5/23/2010	11:40:03 PM	Bubbler valve closed
5/23/2010	11:40:03 PM	Helium valve opened
5/23/2010	11:40:03 PM	Main Vac valve opened
5/23/2010	11:40:03 PM	Bypass valve opened
5/23/2010	11:40:03 PM	Helium MFC set to  100.000000
5/23/2010	11:40:03 PM	H2 MFC set to  0.000000
5/23/2010	11:40:03 PM	BCl3 MFC set to  0.000000
5/23/2010	11:40:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:40:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:40:03 PM	Tube furnace set to 0
5/23/2010	11:42:03 PM	Helium valve closed
5/23/2010	11:42:03 PM	H2 valve closed
5/23/2010	11:42:03 PM	BCl3 valve closed
5/23/2010	11:42:03 PM	PH3 valve closed
5/23/2010	11:42:03 PM	SiCl4 pre valve closed
5/23/2010	11:42:03 PM	SiCl4 post valve closed
5/23/2010	11:42:03 PM	Bubbler valve closed
5/23/2010	11:42:03 PM	Main Vac valve opened
5/23/2010	11:42:03 PM	Bypass valve opened
5/23/2010	11:42:03 PM	Helium MFC set to  0.000000
5/23/2010	11:42:03 PM	H2 MFC set to  0.000000
5/23/2010	11:42:03 PM	BCl3 MFC set to  0.000000
5/23/2010	11:42:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:42:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:42:04 PM	Tube furnace set to 0
5/23/2010	11:47:04 PM	H2 valve closed
5/23/2010	11:47:04 PM	BCl3 valve closed
5/23/2010	11:47:04 PM	PH3 valve closed
5/23/2010	11:47:04 PM	SiCl4 pre valve closed
5/23/2010	11:47:04 PM	SiCl4 post valve closed
5/23/2010	11:47:04 PM	Bubbler valve closed
5/23/2010	11:47:04 PM	Helium valve opened
5/23/2010	11:47:04 PM	Main Vac valve opened
5/23/2010	11:47:04 PM	Bypass valve opened
5/23/2010	11:47:04 PM	Helium MFC set to  100.000000
5/23/2010	11:47:04 PM	H2 MFC set to  0.000000
5/23/2010	11:47:04 PM	BCl3 MFC set to  0.000000
5/23/2010	11:47:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:47:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:47:04 PM	Tube furnace set to 0
5/23/2010	11:47:04 PM	Helium valve closed
5/23/2010	11:47:04 PM	H2 valve closed
5/23/2010	11:47:04 PM	BCl3 valve closed
5/23/2010	11:47:04 PM	PH3 valve closed
5/23/2010	11:47:04 PM	SiCl4 pre valve closed
5/23/2010	11:47:04 PM	SiCl4 post valve closed
5/23/2010	11:47:04 PM	Bubbler valve closed
5/23/2010	11:47:04 PM	Main Vac valve opened
5/23/2010	11:47:04 PM	Bypass valve opened
5/23/2010	11:47:04 PM	Helium MFC set to  0.000000
5/23/2010	11:47:04 PM	H2 MFC set to  0.000000
5/23/2010	11:47:04 PM	BCl3 MFC set to  0.000000
5/23/2010	11:47:04 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:47:04 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:47:04 PM	Tube furnace set to 0
5/23/2010	11:47:11 PM	Run finished at 11:47 PM
5/23/2010	11:47:13 PM	Recipe started at 11:47 PM
5/23/2010	11:47:13 PM	Helium valve closed
5/23/2010	11:47:13 PM	H2 valve closed
5/23/2010	11:47:13 PM	BCl3 valve closed
5/23/2010	11:47:13 PM	PH3 valve closed
5/23/2010	11:47:13 PM	SiCl4 pre valve closed
5/23/2010	11:47:13 PM	SiCl4 post valve closed
5/23/2010	11:47:13 PM	Bubbler valve closed
5/23/2010	11:47:13 PM	Main Vac valve opened
5/23/2010	11:47:13 PM	Bypass valve opened
5/23/2010	11:47:13 PM	Helium MFC set to  0.000000
5/23/2010	11:47:13 PM	H2 MFC set to  0.000000
5/23/2010	11:47:13 PM	BCl3 MFC set to  0.000000
5/23/2010	11:47:13 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:47:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:47:14 PM	Tube furnace set to 0
5/23/2010	11:47:15 PM	H2 valve closed
5/23/2010	11:47:15 PM	BCl3 valve closed
5/23/2010	11:47:15 PM	PH3 valve closed
5/23/2010	11:47:15 PM	SiCl4 pre valve closed
5/23/2010	11:47:15 PM	SiCl4 post valve closed
5/23/2010	11:47:15 PM	Bubbler valve closed
5/23/2010	11:47:15 PM	Helium valve opened
5/23/2010	11:47:15 PM	Main Vac valve opened
5/23/2010	11:47:15 PM	Bypass valve opened
5/23/2010	11:47:15 PM	Helium MFC set to  100.000000
5/23/2010	11:47:15 PM	H2 MFC set to  0.000000
5/23/2010	11:47:15 PM	BCl3 MFC set to  0.000000
5/23/2010	11:47:15 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:47:15 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:47:15 PM	Tube furnace set to 0
5/23/2010	11:49:03 PM	Helium valve closed
5/23/2010	11:49:03 PM	H2 valve closed
5/23/2010	11:49:03 PM	BCl3 valve closed
5/23/2010	11:49:03 PM	PH3 valve closed
5/23/2010	11:49:03 PM	SiCl4 pre valve closed
5/23/2010	11:49:03 PM	SiCl4 post valve closed
5/23/2010	11:49:03 PM	Bubbler valve closed
5/23/2010	11:49:03 PM	Main Vac valve opened
5/23/2010	11:49:03 PM	Bypass valve opened
5/23/2010	11:49:03 PM	Helium MFC set to  0.000000
5/23/2010	11:49:03 PM	H2 MFC set to  0.000000
5/23/2010	11:49:03 PM	BCl3 MFC set to  0.000000
5/23/2010	11:49:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:49:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:49:03 PM	Tube furnace set to 0
5/23/2010	11:54:03 PM	H2 valve closed
5/23/2010	11:54:03 PM	BCl3 valve closed
5/23/2010	11:54:03 PM	PH3 valve closed
5/23/2010	11:54:03 PM	SiCl4 pre valve closed
5/23/2010	11:54:03 PM	SiCl4 post valve closed
5/23/2010	11:54:03 PM	Bubbler valve closed
5/23/2010	11:54:03 PM	Helium valve opened
5/23/2010	11:54:03 PM	Main Vac valve opened
5/23/2010	11:54:03 PM	Bypass valve opened
5/23/2010	11:54:03 PM	Helium MFC set to  100.000000
5/23/2010	11:54:03 PM	H2 MFC set to  0.000000
5/23/2010	11:54:03 PM	BCl3 MFC set to  0.000000
5/23/2010	11:54:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:54:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:54:03 PM	Tube furnace set to 0
5/23/2010	11:56:03 PM	Helium valve closed
5/23/2010	11:56:03 PM	H2 valve closed
5/23/2010	11:56:03 PM	BCl3 valve closed
5/23/2010	11:56:03 PM	PH3 valve closed
5/23/2010	11:56:03 PM	SiCl4 pre valve closed
5/23/2010	11:56:03 PM	SiCl4 post valve closed
5/23/2010	11:56:03 PM	Bubbler valve closed
5/23/2010	11:56:03 PM	Main Vac valve opened
5/23/2010	11:56:03 PM	Bypass valve opened
5/23/2010	11:56:03 PM	Helium MFC set to  0.000000
5/23/2010	11:56:03 PM	H2 MFC set to  0.000000
5/23/2010	11:56:03 PM	BCl3 MFC set to  0.000000
5/23/2010	11:56:03 PM	SiCl4 MFC set to  0.000000
5/23/2010	11:56:03 PM	Bypass solenoid MFC set to  0.000000
5/23/2010	11:56:03 PM	Tube furnace set to 0
5/23/2010	11:58:51 PM	Run finished at 11:58 PM
